Surveillance Devices with Multiple Capacitors

ABSTRACT

The present invention relates to surveillance and/or identification devices having capacitors connected in parallel or in series, and methods of making and using such devices. Devices with capacitors connected in parallel, where one capacitor is fabricated with a relatively thick capacitor dielectric and another is fabricated with a relatively thin capacitor dielectric achieve both a high-precision capacitance and a low breakdown voltage for relatively easy surveillance tag deactivation. Devices with capacitors connected in series result in increased lateral dimensions of a small capacitor. This makes the capacitor easier to fabricate using techniques that may have relatively limited resolution capabilities.

RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application Nos.61/127,899 and 61/056,804, respectively filed on May 15, 2008 and May28, 2008 (Attorney Docket Nos. IDR1831 and IDR1811, respectively), eachof which is incorporated herein by reference in its entirety.

FIELD OF THE INVENTION

The present invention generally relates to the field of surveillanceand/or identification tags and devices. More specifically, embodimentsof the present invention pertain to wireless (e.g., EAS, RF, RFID, HF,VHF, UHF, etc.) tags/devices having multiple capacitors connected inparallel or series, structures and methods for their manufacturingand/or production, and methods of using such tags and/or devices.

BACKGROUND

Surveillance devices, such as Electronic Article Surveillance (EAS)devices or tags, are typically fabricated with a capacitor and/or diode,which are permanently altered to de-tune or deactivate the surveillancedevice. Fabricating a capacitor with both a low breakdown voltage, andthus, a relatively thin dielectric, while achieving high precisioncapacitance can be difficult. This is especially true if the capacitorincludes an inorganic dielectric film as the dielectric medium. Inaddition, it is difficult to fabricate a capacitor having very smalldimensions with high precision.

SUMMARY OF THE INVENTION

Embodiments of the present invention relate tosurveillance/identification tags and devices. More specifically,embodiments of the present invention pertain to wireless (EAS, RF, RFID,HF, VHF, and/or UHF) devices, components thereof (e.g., capacitors,antennas, inductors, etc.), and methods for their manufacture and use.Aspects of the present invention address challenges associated withconventional wireless devices by providing surveillance and/oridentification devices having capacitors connected in parallel toachieve both a high-precision capacitance and a low breakdown voltagefor easy deactivation, as well as methods of forming and using suchdevices. Additional aspects of the present invention address thechallenges associated with conventional wireless devices by providingsurveillance and/or identification devices having capacitors connectedin series to increase the lateral dimensions of a small capacitor,thereby making the capacitor easier to fabricate using techniques thatmay have relatively limited resolution capabilities.

A first aspect of the present invention concerns methods of makingsurveillance and/or identification devices having multiple capacitors.In some embodiments, the capacitors may be connected in parallel. Makinga device with capacitors in parallel may achieve both a high-precisioncapacitance and a low breakdown voltage for easy surveillance tagdeactivation. For example, in embodiments of the present invention, thesingle capacitor generally used in surveillance and/or identificationdevices is replaced with a plurality of capacitors, which are connectedin parallel. In other embodiments, the capacitors may be connected inseries. Making a device with capacitors in series effectively increasesthe lateral dimensions of a small capacitor. This configuration makesthe capacitor easier to manufacture using techniques that may haverelatively limited resolution capabilities. For example, in embodimentsof the present invention, the single capacitor generally used insurveillance and/or identification devices is replaced with a pluralityof capacitors, which are connected in series.

In a first exemplary embodiment, a wireless surveillance and/oridentification device having a plurality of capacitors connected inparallel can be made by (a) forming an electrically conducting strap anda lower capacitor electrode on or over a substrate; (b) forming a firstdielectric film on the substrate and on or over a portion of the strap,the first dielectric film exposing a portion of the strap and having anopening over a portion of the lower capacitor electrode; (c) forming acapacitor dielectric film in the opening, the capacitor dielectric filmhaving a significantly smaller thickness than the first dielectric film;(d) forming an upper capacitor electrode on the first dielectric filmand the capacitor dielectric film, such that the upper capacitorelectrode is capacitively coupled to the lower capacitor electrode; and(e) forming an antenna and/or inductor on, or attaching the antennaand/or inductor to, the upper capacitor electrode and the strap.

In exemplary embodiments for making a device with parallel capacitors,the electrically conducting strap and the lower capacitor electrode areformed in a single processing sequence (e.g., by printing), and thelower capacitor electrode is shared by the parallel capacitors. Printingprocesses may be preferred over conventional blanket deposition,photolithography and etching processes, because printing reduces thenumber of processing steps, the length of time for the manufacturingprocess, and/or the cost of materials used to manufacture the capacitorand/or surveillance/identification device.

In a second exemplary embodiment, a wireless surveillance and/oridentification device with parallel capacitors can be made by (a)forming an antenna and/or inductor on a substrate and a lower capacitorelectrode in electrical communication with a first end of theantenna/inductor; (b) forming a relatively thin capacitor dielectricfilm on at least a first part of the lower capacitor electrode; (c)forming a relatively thick capacitor dielectric on or over a second partof the lower capacitor electrode, the second part of the lower capacitorelectrode not overlapping with the first part thereof; (d) forming anupper capacitor electrode on the thin and thick capacitor dielectricfilms, capacitively coupled to the lower capacitor electrode; and (e)forming an electrically conducting strap configured to provideelectrical communication between the upper capacitor electrode and asecond end of the antenna/inductor. Forming the structures and/or layersof the device in such an arrangement (e.g., forming a lower capacitorelectrode, the relatively thin and the relatively thick capacitordielectric films, and an upper capacitor electrode), allows for theformation of parallel capacitors with dielectric film of differentthicknesses under controlled and reproducible conditions using the samesequence of steps, and in the case of printing, withoutphotolithography.

According to a third exemplary embodiment, a wireless surveillanceand/or identification device with capacitors connected in series can bemade by (a) forming a first dielectric film on a conductive (e.g.,electrically functional) substrate; (b) forming a plurality of capacitorelectrodes on the first dielectric film, the capacitor electrodes beingcapacitively coupled to the substrate and physically isolated from eachother; (c) forming a second dielectric film on or over the capacitorelectrodes, the second dielectric film having holes therein tofacilitate electrical connection to the capacitor electrodes; and (d)forming an inductor or antenna electrically connected to each of thecapacitor electrodes. In such embodiments, the capacitors in seriespreferably share the conductive substrate as a common lower capacitorelectrode.

A second aspect of the present invention concernssurveillance/identification devices having multiple capacitors (e.g.,capacitors connected in parallel and/or capacitors connected in series).In a first general embodiment, a surveillance and/or identificationdevice with capacitors connected in parallel comprises (1) anelectrically conducting strap on a substrate; (2) a lower capacitorelectrode on or over the substrate, electrically connected to the strap;(3) a first dielectric film on the substrate and on or over a portion ofthe strap, the first dielectric film exposing a portion of the strap andhaving an opening over a portion of the lower capacitor electrode; (4) acapacitor dielectric film on the lower capacitor electrode in theopening, the capacitor dielectric film having a significantly smallerthickness than the first dielectric film; (5) an upper capacitorelectrode on the first dielectric film and the capacitor dielectricfilm, the upper capacitor electrode capacitively coupled to the lowercapacitor electrode; and (6) an antenna and/or inductor electricallyconnected to the upper capacitor electrode and the strap.

In a second general embodiment, a surveillance and/or identificationdevice with capacitors connected in parallel comprises (1) an antennaand/or an inductor on a substrate; (2) a lower capacitor electrode on orover the substrate and in electrical contact with the antenna and/orinductor; (3) a first dielectric film on or over the antenna and/orinductor and the lower capacitor electrode, the first dielectric filmhaving a hole therein exposing a portion of the antenna and/or inductorand an opening therein over the lower capacitor electrode; (4) arelatively thin capacitor dielectric film on the lower capacitorelectrode in the opening in the first dielectric film and having athickness significantly less than that of the first dielectric film; (5)an upper capacitor electrode capacitively coupled to the lower capacitorelectrode; and (6) an electrically conducting strap configured toprovide electrical communication between the upper capacitor electrodeand the antenna and/or inductor.

In a third general embodiment, a surveillance and/or identificationdevice with capacitors connected in series generally comprises (1) anelectrically conductive substrate; (2) a first dielectric film on theelectrically conductive substrate; (3) a plurality of capacitorelectrodes on the first dielectric film, capacitively coupled to thesubstrate and physically isolated from each other; (4) a seconddielectric layer on or over the capacitor electrodes having one or moreholes therein; and (5) an inductor electrically connected to theplurality of capacitor electrodes through the holes.

A third aspect of the present invention concerns a method of detectingitems with the surveillance and/or identification devices of the presentinvention. In general, a surveillance/identification device can bedetected by causing or inducing a current in the device that issufficient for the device to radiate, reflect, absorb, or backscatterdetectable electromagnetic radiation, detecting the detectableelectromagnetic radiation, and optionally selectively deactivating thedevice or instructing the device to perform an action.

The embodiments described herein provide surveillance tags and/ordevices having high-precision capacitance and a low breakdown voltage toprovide relatively reliable tag deactivation and/or high precisionprinting of capacitors having very small dimension(s). These and otheradvantages of the present invention will become readily apparent fromthe detailed description of preferred embodiments below.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a circuit diagram showing a wireless surveillance and/oridentification device with capacitors connected in parallel according tothe present invention.

FIG. 2 is a circuit diagram showing a wireless surveillance and/oridentification device with capacitors connected in series according tothe present invention.

FIGS. 3A-3B show top-down and cross-sectional views, respectively, of anexemplary intermediate in a first exemplary method for making asurveillance and/or identification device with capacitors connected inparallel, according to embodiments of the present invention.

FIG. 3C shows a cross-sectional view of an exemplary multi-layeredsubstrate according to embodiments of the present invention.

FIGS. 4A-4B show top-down and cross-sectional views, respectively, ofanother exemplary intermediate in the first exemplary method for makinga surveillance and/or identification device with capacitors connected inparallel, according to embodiments of the present invention.

FIGS. 5A-5B show top-down and cross-sectional views, respectively, of anexemplary surveillance and/or identification device with capacitorsconnected in parallel, according to embodiments of the presentinvention.

FIGS. 6A-6B show top-down and cross-sectional views, respectively, of anexemplary intermediate in a second exemplary method for making asurveillance and/or identification device with capacitors connected inparallel, according to embodiments of the present invention.

FIG. 6C shows a cross-sectional view of the device of FIG. 6B with afirst dielectric film formed thereon.

FIG. 6D shows a cross-sectional view of the device of FIG. 6C with acontact hole formed in the first dielectric film.

FIGS. 7A-7B show top-down and cross-sectional views, respectively, ofanother exemplary intermediate in the second exemplary method for makinga surveillance and/or identification device with capacitors connected inparallel, according to embodiments of the present invention.

FIG. 7C shows a cross-sectional view of the device of FIG. 7B with arelatively thin capacitor dielectric film formed thereon.

FIG. 7D shows a cross-sectional view of the device of FIG. 7C with arelatively thick dielectric film formed thereon.

FIGS. 8A-8B show top-down and cross-sectional views, respectively, ofanother exemplary intermediate in the second exemplary method for makinga surveillance and/or identification device with capacitors connected inparallel, according to embodiments of the present invention.

FIG. 8C shows a cross-sectional view of the device of FIG. 8B with acontact hole formed in the first dielectric layer exposing a portion ofthe antenna and/or inductor.

FIGS. 9A-9B show top-down and cross-sectional views, respectively, of asecond exemplary surveillance and/or identification device withcapacitors connected in parallel, according to embodiments of thepresent invention.

FIGS. 10A-10B show cross-sectional views of exemplary surveillanceand/or identification devices with capacitors connected in parallel,according to embodiments of the present invention.

FIG. 11 shows a cross-sectional view of an exemplary surveillance and/oridentification device with capacitors connected in series, according toembodiments of the present invention.

FIG. 12 shows a top-down view of the surveillance and/or identificationdevice of FIG. 11.

DETAILED DESCRIPTION

Reference will now be made in detail to embodiments of the presentinvention, examples of which are illustrated in the accompanyingdrawings. While the invention will be described in conjunction withvarious embodiments, it will be understood that they are not intended tolimit the invention to these embodiments. On the contrary, the inventionis intended to cover alternatives, modifications and equivalents, whichmay be included within the scope of the invention as defined by theappended claims. Furthermore, in the following detailed description ofthe present invention, numerous specific details are set forth in orderto provide a thorough understanding of the present invention. However,it will be readily apparent to one skilled in the art that the presentinvention may be practiced without these specific details. In otherinstances, well-known methods, procedures, components, and circuits havenot been described in detail so as not to unnecessarily obscure aspectsof the present invention. In addition, it should be understood that thepossible permutations and combinations described herein are not meant tolimit the invention. Specifically, variations that are not inconsistentmay be mixed and matched as desired.

For the sake of convenience and simplicity, the terms “coupled to,”“connected to,” and “in communication with” mean direct or indirectcoupling, connection or communication unless the context indicatesotherwise. These terms are generally used interchangeably herein, butare generally given their art-recognized meanings Also, for convenienceand simplicity, the terms “surveillance,” “identification,” “EAS,” “RF,”and “RFID,” may be used interchangeably with respect to intended usesand/or functions of a device and/or tag, and the terms “EAS tag” or “EASdevice” may be used herein to refer to any EAS and/or surveillance tagand/or device. In addition, the terms “item,” “object” and “article” areused interchangeably, and wherever one such term is used, it alsoencompasses the other terms.

Furthermore, the terms “capacitor electrode” and “capacitor plate” maybe used interchangeably. Also, the terms “feature,” “shape,” “line,” and“pattern” may be used interchangeably, and generally refer to anelectrically conductive structure of a semiconductor device. The term“(semi)conductor,” “(semi)conductive” and grammatical equivalentsthereof refer to materials, precursors, layers, features or otherspecies or structures that are conductive and/or semiconductive.

In the present application, the term “deposit” (and grammaticalvariations thereof) is intended to encompass all forms of deposition,including blanket deposition (e.g., CVD, ALD, and PVD), (spin)coating,and printing. In general, “coating” refers to a process where an ink orother material is deposited on substantially the entire substrate orsurface, whereas “printing” generally refers to a process where an inkor other material is deposited in a predetermined pattern in certainareas of the substrate or surface. In various embodiments, coating maycomprise spin-coating, spray-coating, slit coating, extrusion coating,meniscus coating, and/or pen-coating. In other embodiments, printing maycomprise inkjet printing, gravure printing, offset printing,flexographic printing, screen printing, microspotting, stenciling,stamping, syringe dispensing, pump dispensing, laser forward transfer,local laser CVD, and/or pen-coating.

Also, unless indicated otherwise from the context of its use herein, theterms “known,” “fixed,” “given,” “certain” and “predetermined” generallyrefer to a value, quantity, parameter, constraint, condition, state,process, procedure, method, practice, or combination thereof that is, intheory, variable, but is typically set in advance and not variedthereafter when in use. In addition, the term “doped” refers to amaterial that is doped with a substantially controllable dose of anydopant (e.g., lightly doped, heavily doped, or doped at any doping levelin between).

In the present disclosure, the phrase “consisting essentially of a GroupIVA element” does not exclude intentionally added dopants, which maygive the Group IVA element certain desired (and potentially quitedifferent) electrical properties. The term “(poly)silane” refers tocompounds or mixtures of compounds that consist essentially of (1)silicon and/or germanium and (2) hydrogen, and that predominantlycontain species having at least 10-15 silicon and/or germanium atoms.Such species may be linear, branched, or cross-linked, and may containone or more cyclic rings. The term “(cyclo)silane” refers to compoundsor mixtures of compounds that consist essentially of (1) silicon and/orgermanium and (2) hydrogen, and that may contain one or more cyclicrings and less than 10-15 silicon and/or germanium atoms. In a preferredembodiment, the silane has a formula Si_(x)H_(y), where x is from 3 toabout 200, and y is from x to (2x+2), where x may be derived from anaverage number molecular weight of the silane. The term“hetero(cyclo)silane” refers to compounds or mixtures of compounds thatconsist essentially of (1) silicon and/or germanium, (2) hydrogen, and(3) dopant atoms such as B, P, As or Sb that may be substituted by aconventional hydrocarbon, silane or germane substituent and that maycontain one or more cyclic rings.

Various embodiments of the present invention relate to surveillanceand/or identification tags or devices comprising a plurality ofcapacitors connected in parallel, and methods of forming such tags ordevices. Other embodiments of the present invention relate tosurveillance and/or identification tags or devices comprising aplurality of capacitors connected in series, and methods of forming thesame. Still, further embodiments of the present invention relate tomethods of detecting items using the various surveillance/identificationtags described herein.

The invention, in its various aspects, will be explained in greaterdetail below with regard to exemplary embodiments. While the embodimentrelate primarily to surveillance and/or security tags/devices, thepresent methods and structures are also useful in identification andother wireless devices that include one or more antennas and/orinductors, capacitors, and connections therebetween.

Exemplary Surveillance and/or Identification Device Circuits HavingMultiple Capacitors

According to embodiments of the present invention, a device can have orbe manufactured with a plurality of capacitors connected in paralleland/or a plurality of capacitors connected in series. FIG. 1 shows acircuit diagram of an exemplary device manufactured with capacitorsconnected in parallel according to the present invention. As shown inFIG. 1, two capacitors, C1 and C2, are connected in parallel, and C1 maybe larger than C2. In exemplary embodiments, C1 is substantially largerthan C2. Despite the relative capacitances of C1 and C2, the largercapacitor C1 may be fabricated with a thicker dielectric, which resultsin capacitor C1 having a substantially larger area than capacitor C2.Such a large-area capacitor can be manufactured to a high precision ofcapacitance (e.g., to precisely control the overall capacitance) becausethe large geometric features are within the tolerances of the printingor patterning processes used to define the capacitor. The relativelythick dielectric film of the large-area capacitor C1 allows thethickness to be controlled to a finer precision than a very thindielectric film generally allows. In contrast, the smaller capacitor C2is fabricated with a much thinner dielectric, which allows this smallercapacitor to break down at a relatively low voltage. Generally, arelatively low, controllable capacitor breakdown voltage is useful forsurveillance or security tag deactivation. Furthermore, the capacitanceof C2 is much smaller than that of C1, so that C2 can be fabricated witha relatively poor precision compared to that of C1, and still have arelatively minor effect on the overall precision of the net capacitanceC1+C2.

FIG. 2 shows a circuit diagram of an exemplary device fabricated withcapacitors connected in series according to the present invention. Asshown in the example of FIG. 2, two capacitors, C1 and C2, are connectedin series, and they share a common electrode (labeled “foil” in FIG. 2).In this embodiment, the capacitances add in series to an effectivecapacitance of CT as shown in the formula: 1/CT=1/C1+1/C2. If C1=C2,both C1 and C2 are twice the capacitance of the net capacitance CT, andtherefore twice as large (in area) as a single capacitor havingcapacitance CT would be. Consequently, this may increase the dimensions(and thus the manufacturing margins) for any printing or patterningsteps that may be used to define the capacitor area.

Exemplary Methods of Making a Surveillance and/or Identification Devicewith Multiple Capacitors

Exemplary embodiments for manufacturing devices with parallel and seriescapacitors are discussed herein. In addition, a detailed discussionregarding general methods that may be used to form any of the devicesdescribed in the various embodiments, as well as the individualstructures of such devices, is also provided herein.

A First Exemplary Method for Making Devices with Parallel Capacitors

A first general method for making a surveillance and/or identificationdevice with capacitors connected in parallel is discussed herein withregard to FIGS. 3A-5B. FIG. 3A shows a top-down view, of a substrate 110having an electrically conducting strap 120 (e.g., “feature,” “line,”“pattern,” and/or “shape”) and a lower capacitor electrode 122 formedthereon or thereover. The dashed lines in FIG. 3A forming a square orrectangle represent lines along which an array of substrates, eachhaving integrated circuitry formed thereon, are separated. These linesmay represent perforations in a polymeric sheet or web, scribe lines ina semiconductor wafer or on a glass sheet or slip, or lines along whicha metal sheet or foil is cut, or separate the individual integratedcircuits from each other. FIG. 3B shows a cross-sectional view of FIG.3A along the A-A′ axis. The electrically conducting strap 120 is formedon the substrate to provide electrical communication between the uppercapacitor electrode(s) and the antenna/inductor, which are subsequentlyformed as shown in FIGS. 4A-5B as discussed herein.

i. Preparing the Substrate

In general, the substrate used to manufacture a wireless tag or devicemay comprise a conductive, semiconductive, or insulative material,depending somewhat on the method of making the device. In preferredvariations of the first exemplary method, the substrate comprises aninsulating material. However, the substrate may also comprise aconductive or semiconductive material having one or more insulatinglayers thereon, as shown in FIG. 3C. Referring to FIG. 3C, the substrate110 may comprise a layered structure. For example, the substrate 110 mayinclude a metal (e.g., aluminum, stainless steel, copper, etc.) foil orsheet 102 (or other conductive/semiconductive material) with one or moreinsulating layers thereon (e.g., layers 104 a and/or 104 b). In suchembodiments, the insulating layer 104 a may be an oxide of a metal inthe metal substrate (e.g., aluminum oxide), or alternatively, ablanket-deposited or coated insulator layer (e.g., a ceramic or glasssuch as silicon dioxide, a polymer, an inorganic insulator, an organicinsulator, etc.). When present, a second layer 104 b may also be part ofthe substrate, and in one embodiment, layer 104 b comprises the samematerial as the first insulating layer 104 a.

Other suitable conductive, semiconductive, and insulative materials aredescribed herein with regard to exemplary surveillance/identificationdevices with multiple capacitors and/or methods of forming the same. Inimplementations comprising a conductive substrate, the metal for theconductive substrate may be chosen at least in part based on its abilityto be anodized into an effective dielectric. In exemplary embodiments,the substrate may have a nominal thickness of from 1-200 μm (preferably20-100 μm in those embodiments in which a high Q is advantageous, suchas certain EAS and/or surveillance devices). Furthermore, conductivesubstrates may have a resistivity of 0.1-100 μohm-cm (preferably 0.5-80μohm-cm), or any range of values therein. Additionally, prior tosubsequent processing, the conductive substrate may be conventionallycleaned and smoothed. This surface preparation may be achieved bychemical polishing, electropolishing and/or oxide stripping to reducesurface roughness and remove low quality native oxides. A description ofsuch processes is given in “The Surface Treatment and Finishing ofAluminum and Its Alloys,” by P. G. Sheasby and R. Pinner, 6^(th) ed.,ASM International, 2001, the relevant portions of which are incorporatedherein by reference. Alternatively, one or both of insulating layers 104a-b can be formed by spin-coating or dip-coating a liquid phaseinsulator precursor solution (e.g., a spin-on glass [SOG] formulation)onto the substrate. In some implementations, insulating layer 104 a maybe formed using a blanket deposition process as described herein (e.g.,CVD, PVD, ALD, etc.). In some variations, an adhesive layer (e.g., 104 bin FIG. 3C) may be added to a face of the substrate (e.g., opposite tothe interface with an antenna and/or inductor or other circuit element)for attaching the device to an item, generally after the remainder ofthe tag is fabricated.

ii. Forming the Electrically Conducting Strap

Referring again to FIG. 3B, an electrically conducting strap 120 isformed on the substrate 110. In general, the electrically conductingstrap 120 can be formed by any suitable method known in the art. Forexample, in exemplary embodiments, the strap 120 may be formed byprinting processes such as inkjet printing, microspotting, stenciling,stamping, syringe dispensing, pump dispensing, screen printing, gravureprinting, offset printing, flexography, laser forward transfer, and/orlocal laser CVD. In such printing processes, the strap 120 and lowercapacitor electrode 122 may be formed by selectively printing aconductor ink (e.g., metal ink, metal precursor ink, etc.) on thesubstrate. Exemplary conductor ink and ink formulations are discussed indetail herein. In embodiments comprising a conductive substrate 110, thestrap 120 may be printed on an insulating layer (e.g., 104 a in FIG. 3C)that was previously deposited on the substrate using any suitable methodknown in the art (see, e.g., the section herein entitled, “Forming theDielectric Film Layers”).

In other embodiments, forming the strap may comprise depositing aconductive material on the substrate 110 (or on an insulating layer 104a on a conductive substrate), and then etching the conductive materialto form the desired pattern (e.g., 120/122). For example, a conductivematerial may be blanket deposited or coated on the substrate 110. Then,portions of the conductor material that are not covered by a mask (e.g.,the unmasked regions of the conductor material) are selectively etched.Alternatively, the strap 120 may be formed by printing a conductive seedlayer, and then electroplating or electrolessly plating a bulk conductorthereon (see, e.g., U.S. patent application Ser. Nos. 12/131,002,12/175,450, and 12/243,880, respectively filed on May 30, 2008, Jul. 17,2008, and Oct. 1, 2008 [Attorney Docket Nos. IDR1263, IDR1052, andIDR1574, respectively], the relevant portions of which are incorporatedherein by reference).

The electrically conducting strap 120 may be formed using any of theconductive materials/metals as discussed herein. In someimplementations, the strap 120 and the lower capacitor electrode (e.g.,structure 122 of FIG. 3A) are formed at the same time, in a singleprocessing sequence or step. In such embodiments, the lower capacitorelectrode 122 may be shared by (or common to) the parallel capacitors.In such implementations, the strap 120 and the lower capacitor electrode122 may comprise or consist essentially of silver, gold, copper,palladium, aluminum, tungsten, titanium, a multilayer laminate thereof,or a conductive alloy thereof. In exemplary embodiments, the strap 120and lower capacitor electrode 122 may be formed using the same materialas one or more subsequently-formed upper capacitor electrodes and/orantennas/inductors. However, the invention is not limited as such, andthe strap 120 and lower capacitor electrode 122 may be made usingdifferent materials than those of the upper/lower capacitor electrode(s)and/or the antenna/inductor.

iii. Forming the Capacitor Dielectric Films

Referring to FIG. 3B, the present method further comprises the step ofdepositing or forming a first (capacitor) dielectric film 130/132 on atleast a portion of the substrate 110, and on or over a portion of thestrap 120 and lower capacitor electrode 122. In some implementations,the first dielectric film 130/132 may comprise an interlayer dielectricfilm (ILD). Thus, in exemplary embodiments, the dielectric film 130/132may be formed such that its thickness is from 2,000 to 20,000 Å, or anyrange of values therein. In certain implementations, the dielectric film130/132 may have a thickness of from 3,000 to 5,000 Å.

In exemplary embodiments, the first dielectric film 130/132 exposes aportion (e.g., a predetermined region) of the strap 120, and forms acontact hole or opening exposing a portion (e.g., a predeterminedregion) of the lower capacitor electrode 122. The first dielectric film130/132 having the contact hole therein may be formed using any of themethods described in detail herein (e.g., blanket deposition,photolithography and etching, selective deposition by printing, etc.).The first dielectric layer 130/132 provides an electrical separation(e.g., in terms of leakage and capacitance) between a subsequentlyformed antenna and/or inductor and the electrically conducting strap120.

Next, a capacitor dielectric film 140 is formed on the electricallyconducting strap 120, including the region exposed by the opening in thefirst dielectric film 130 as described herein. The capacitor dielectricfilm 140 generally has a significantly smaller thickness than that ofthe first dielectric film 130/132. In some alternate embodiments, therelatively thin capacitor dielectric film 140 may be formed on the strap120 and the lower capacitor electrode 122 in a predetermined patternprior to forming the first dielectric film 130/132, using any of themethods described herein. In some variations, some portion(s) of thecapacitor dielectric film formed on the strap 120 (e.g., structure 142of FIG. 3B) may be removed as desired by selectively etching to expose aportion of the strap 120 for electrical connection to a subsequentlyformed inductor and/or antenna, generally after masking portion 140 inthe contact hole to preserve it for use as a thin capacitor dielectric(e.g., for capacitor C2 in FIG. 1).

In general, the dielectric film layers (e.g., the interlayer dielectricand/or relatively thick capacitor dielectric layer 130/132, therelatively thin dielectric layer 140, etc.) and the contact holes formedtherein may be made using techniques and materials known in the art. Forexample, in some embodiments, the dielectric film is coated or depositedover the entire device by blanket deposition techniques known in theart. For example, blanket deposition of the dielectric film layers maybe done by extrusion coating, blade coating, dip coating, linearcoating, spin coating or other coating techniques, or in thealternative, by local deposition techniques such as printing ordispensing. Selected portions of the dielectric film are removed (e.g.,by conventional photolithography and etching) to form contact holes oropenings over (or to expose) desired regions of underlying conductivestructures (e.g., the capacitor electrode(s) 122, the strap 120, etc.).Such blanket deposition and etching processes are described in detail inU.S. patent application Ser. Nos. 11/452,108, 11/888,949, and11/818,078, respectively filed Jun. 12, 2006, Aug. 3, 2007, and Jun. 12,2007 (Attorney Docket Nos. IDR0502, IDR0742, and IDR0813, respectively),the relevant portions of which are incorporated herein by reference.

In some embodiments, the dielectric film(s) 130/132 and/or 140/142 canbe deposited by vacuum deposition methods (e.g., chemical vapordeposition [CVD], plasma-enhanced chemical vapor deposition [PECVD],low-pressure chemical vapor deposition [LPCVD], sputter deposition,etc.). Another method of forming the thin dielectric 140/142 employsanodization to form a MOS dielectric and/or a deactivation dielectric).A detailed description of forming the thin dielectric 140/142 byanodization is found in U.S. Pat. No. 7,286,053, the relevant portionsof which are incorporated herein by reference.

In alternative embodiments, the dielectric films 130/132 and/or 140/142may be formed by depositing a dielectric precursor material (e.g., byprinting or chemical bath deposition processes), and then converting theprecursor to a dielectric film (e.g., by drying, curing, and/orannealing). However, methods such as printing or vapor deposition (e.g.,CVD, physical vapor deposition [PVD], etc.) are preferred if theconductive substrate is one that cannot be processed at hightemperatures (e.g., above 200° C., 250° C., 550° C., 600° C., or anyother temperature above 200° C.). The dielectric precursor material maycomprise a liquid-phase dielectric precursor ink. In one embodiment, theliquid-phase dielectric precursor ink may comprise a compound of theformula A_(n)H_(y), where n is from 3 to 12, each A is independently Sior Ge, and y is an even integer of from n to 2n+2, and preferably acompound of the formula (AH_(z))_(n), where n is from 5 to 10, each A isindependently Si or Ge, and each of the n instances of z isindependently 1 or 2. A corresponding silicon and/or germanium oxidefilm may be formed by curing the precursor film as described herein.After the precursor material has been converted to the dielectric film,additional metal oxides (e.g., TiO₂, ZrO₂, HfO₂, etc.) or otherdielectric (e.g., silicon nitride, silicon oxynitride, aluminumoxynitride, aluminosilicates, etc.) may be deposited on the film. Thus,in some variations, the dielectric films may comprise a plurality oflayers.

In the case of printing, the process may also serve the purpose ofpatterning the dielectric films. Patterning of the dielectric films maybe done by direct printing of one or more dielectric precursor materials(e.g., by inkjet printing, screen printing, gravure printing,flexography, laser forward transfer, etc.) or by indirect patterning(such as with a photo- and/or thermo-patternable precursor material thatis exposed by a photomask, thermal or laser pattern and developed, orextrinsically via a patterning process such as conventionalphotolithography, etching, embossing or similar technique). In someimplementations, the etching process may comprise laser ablation,mechanical penetration or other etching or dielectric removal techniquesknown in the art.

In alternate embodiments, the dielectric films 130/132 and/or 140/142may be selectively deposited on one or more predetermined portions ofthe structure (e.g., the substrate, the strap, and/or the lowerelectrode) to form a desired pattern. In preferred embodiments,selective deposition may be accomplished using any of the variousprinting processes and techniques discussed herein. Specifically, insome implementations, the dielectric film layers may be formed by (i)printing a liquid-phase composition (e.g., a solution, suspension,emulsion, ink, etc., containing a dielectric precursor) on at leastpredetermined portions of the device, in a predetermined pattern andwith a characteristic resolution (e.g., minimum layout dimension,spacing, alignment margin of error, or any combination thereof), and(ii) drying and/or curing (e.g., by annealing) the dielectriccomposition to form the dielectric film. In such embodiments, materialssuch as spin-on-glasses and/or boron nitride can be selectively printedon the device as desired. Other suitable dielectric materials anddielectric precursor inks are described in detail herein.

In preferred variations, a liquid-phase dielectric material (e.g., adielectric precursor ink as described herein) may be selectively printedon the structure such that a contact hole or opening is formed to exposeone or more portions of the lower conductive structures (e.g., 120and/or 122) as desired. In the alternative, the dielectric film/layersmay be printed to cover the entire substrate, and then etched usingsubsequently formed structures as a mask to form the desired dielectricfilm pattern.

In exemplary embodiments, the dielectric films 130/132 and/or 140/142may be formed by thermal and/or chemical oxidation processes. In someimplementations, the dielectric films may be formed (e.g., grown) byoxidizing and/or nitriding a conductive film, substrate or otherstructure (such as a liquid oxide/nitride precursor). Generally, thismay be done in an oxidizing and/or nitriding atmosphere. For example,the dielectric films can be formed by oxidizing a liquid silane printedonto the structure, or by coating the structure with another conductivematerial that can be oxidized or nitrided (e.g., silicon, aluminum,chromium, hafnium etc.). In the alternative, the dielectric film may beformed by depositing (e.g., by printing liquid phase or chemical bathdeposition processes) a dielectric precursor material (e.g., a SiO₂precursor such as tetraalkylsiloxane or tetraalkoxysilane) andsubsequently converting the precursor to a dielectric film (e.g., bydrying, curing, and/or annealing). In one embodiment, the relativelythin capacitor dielectric film 140 is grown on the strap 120 and thelower capacitor electrode 122 by anodization, or alternatively, bychemically or thermally oxidizing and/or nitriding the strap and lowerelectrode 120/122 as described herein, and the relatively thickdielectric film 130/132 is deposited on the substrate by blanketdeposition or a printing process as described herein. In some alternateembodiments, the dielectric film 130/132 and/or the dielectric film140/142 may be formed by atomic layer deposition (ALD). Other techniquesfor forming the dielectric films, and the benefits thereof, aredescribed in U.S. Pat. No. 7,286,053, the relevant portions of which areincorporated herein by reference.

The liquid-phase dielectric precursor ink used in the above-describedprinting and/or coating processes may comprise a glass-formingformulation, an organic dielectric, an oxidized silicon precursor, ormolecular and/or nanoparticle based silicon formulation as describedherein. The corresponding dielectric film may be formed by curing theprecursor film (e.g., Group IVA element precursor film) in an oxidizingatmosphere, at a temperature of 300° C., 350° C. or 400° C. or more, butin embodiments including a conductive substrate, less than the meltingtemperature of the substrate. Curing may be done in the presence ofoxygen, ozone, N₂O, NO₂, or other oxidizing gas, which may be diluted inan inert carrier gas such as nitrogen, argon or helium. In thealternative, other solution-based dielectrics (e.g., organicdielectrics), may be applied by printing or other conventional coatingsteps.

The dielectric films may be formed using any suitable electricallyinsulating dielectric material as discussed herein. In variousembodiments, the relatively thin dielectric film (e.g., structure 140 ofFIG. 3B) is formed such that its thickness is from 50 to 500 Å and/or ithas a breakdown voltage of from about 5 V to less than 50 V, preferablyfrom 4 V to 15 V, depending on factors such as Q, the thickness of thedielectric film, etc. Such thin films are advantageously formed bythermal and/or chemical oxidation. However, the thickness of eachdielectric film (e.g., the first dielectric film, the capacitordielectric film, the ILD, etc.) may be adjusted as needed to controlcapacitance and/or to control the voltage at which the dielectric filmis intended to rupture.

iv. Forming the Upper Capacitor Electrode(s)

FIG. 4A shows a top-down view of an upper capacitor electrode 160 formedon the first dielectric film 130/132 and the relatively thin capacitordielectric film 140. FIG. 4B shows a cross-sectional view of FIG. 4Aalong the A-A′ axis. In general, the upper capacitor electrode 160 iscapacitively coupled to the lower capacitor electrode 122, and formsfirst and second capacitors connected in parallel. In exemplaryembodiments, the second capacitor includes the relatively thickcapacitor dielectric film (e.g., the first dielectric film 130/132) andhas a much greater area than that of the first capacitor which is formedacross capacitor dielectric film 140. Thus, the second capacitor has agreater capacitance than the first capacitor.

In general, the capacitor electrode(s) of the various embodiments (e.g.,upper and/or lower capacitor electrodes) may be formed using anysuitable technique known in the art (e.g., blanket deposition,photolithography and etching, printing, etc.). For example, in variousimplementations, a conductive material is blanket deposited byspin-coating an ink (e.g., a conductor ink, a metal precursor ink, asemiconductor ink, etc.) containing the conductive material (e.g., acompound and/or nanoparticles of a metal, such as an organometallicprecursor and/or metal nanoparticles), and the ink is subsequently curedor annealed. In preferred alternate embodiments, the metal ink isselectively deposited by printing an ink comprising a precursor of adesired metal (e.g., a silicide-forming metal) in a solvent, andsubsequently dried, cured, and/or annealed.

The conductive (e.g., metal-containing) material may be printed usingany of the techniques described herein. Printing processes allow forgreater control of the thickness of the printed metal layer, and thusgreater control of the thickness of the upper electrode. For example, ifa thicker upper electrode is desired, the number of drops, the dropvolume, or the ink volume can be increased. A thicker electrode (e.g.,metal layer) may also be achieved by decreasing the pitch between dropsin an area where the thicker electrode (e.g., having lower resistance)is desired. Furthermore, printing processes allow the contact angle ofthe printed ink to be varied locally. To illustrate, a preprinting stepadapted to locally vary the surface energy of the substrate can beperformed so that different metal heights/thicknesses and/or line widthscan be achieved with a single printing step. Exemplary methods forvarying surface energy prior to printing are described in detail in U.S.patent application Ser. No. 12/175,450 (Attorney Docket No. IDR1052),filed on Jul. 17, 2008, the relevant portions of which are incorporatedherein by reference.

In various implementations, the conductor ink may comprise precursors ofany of the elemental metals described herein (e.g., titanium, tungsten,nickel, palladium, platinum, etc).

Additionally or alternatively, the conductor ink may comprise aconventional alloy of such elemental metals, such as aluminum-copperalloys, aluminum-silicon alloys, aluminum-copper-silicon alloys,titanium-tungsten alloys, molybdenum-tungsten alloys, aluminum-titaniumalloys, etc. In other implementations, electrically conductive metalcompounds, such as nitrides and/or silicides of elemental metals (e.g.,titanium nitride, titanium silicide, TiSiN, tantalum nitride, cobaltsilicide, molybdenum silicide, tungsten silicide, WN, WSiN, platinumsilicide, etc.) may be used in the conductor ink formulation. Printablesilicide-forming precursor formulations, and methods of forming suchprintable formulations, are described in co-pending U.S. patentapplication Ser. No. 12/131,002, filed May 30, 2008 (Attorney Docket No.IDR1263), the relevant portions of which are incorporated herein byreference.

In other implementations, the metal/conductor ink comprises one or moremetal precursors selected from the group consisting of metalnanoparticles, organometallic compounds, and metal salts, in a solventin which the metal precursor(s) are soluble. In exemplaryimplementations, the metal of the conductor ink is able to withstandhigh-temperature processing, such as temperatures greater than 660° C.,800° C., 900° C., 1,000° C., or any or temperature greater than 660° C.Examples include chromium, molybdenum, tungsten, nickel, palladium,platinum, and conventional metal alloys thereof (e.g., nickel-chromiumalloys, titanium-tungsten alloys, molybdenum-tungsten alloys, etc.).

In some variations, the ink precursor for the capacitor electrodes maycomprise nanoparticles and/or molecular, oligomeric and/or polymericcompounds of silicon, silicide forming metals (e.g., Ni, Co, Pd, Pt, Ti,W, and/or Mo), refractory metals (e.g., Pd, Mo, and/or W), orcombinations thereof. The nanoparticles or nanocrystals in the inkformulation may be passivated or unpassivated, as described in U.S. Pat.Nos. 7,422,708, 7,294,449, 7,485,691, and 7,491,782, and in co-pendingU.S. application Ser. Nos. 10/616,147, 11/373,696, 11/867,587,11/888,949, and 11/888,942 (Attorney Docket Nos. KOV-004, KOV-004-D2,IDR0884, IDR0742, and IDR0743, respectively), respectively filed Jul. 8,2003, Mar. 10, 2006, Oct. 4, 2007, Aug. 3, 2007, and Aug. 3, 2007, therelevant portions of which are incorporated herein by reference.

In exemplary embodiments, the metal-containing ink may comprise orconsist essentially of the metal precursor (e.g., metal-containingmaterial) in an amount of from 1 to 50 wt. % of the ink (or any range ofvalues therein), and a solvent in which the metal-containing material issoluble. In exemplary embodiments, the metal ink comprises any of theelemental metals described herein (e.g., aluminum, nickel, gold,palladium, platinum, etc.), or alloys thereof.

In some embodiments, the ink formulation may consist essentially of oneor more Group 4, 5, 6, 7, 8, 9, 10, 11, or 12 metal salt(s) and/or metalcomplex(es), one or more solvents adapted to facilitate coating and/orprinting of the formulation. Optionally, the formulation may include oneor more additives that form gaseous or volatile by-products uponreduction of the metal salt or metal complex to an elemental metal oralloy thereof. In further embodiments, the ink formulation may furtherconsist essentially of (or the additive may comprise) an anion source,adapted to facilitate dissolution of the metal salt or metal complex inthe solvent. Such ink formulations and methods of forming the same aredescribed in co-pending U.S. patent application Ser. No. 12/131,002(Attorney Docket No. IDR1263), the relevant portions of which areincorporated herein by reference.

In some implementations, the conductor ink comprises a semiconductor. Invarious embodiments, the semiconductor may be heavily doped. In the caseof silicon or silicon-germanium, the dopant may be selected from thegroup consisting of boron, phosphorous and arsenic, typically in aconventional concentration (e.g., from 10¹⁷ to 10²¹, 10¹⁸ to 10²¹, 10¹⁹to 10²¹ atoms/cm² or any range of values therein). Suitablesemiconductor inks may further comprise a liquid-phase (poly)- and/or(cyclo)silane. Liquid-phase semiconductor inks may further comprise asemiconductor nanoparticle (such as passivated Si, Ge, or SiGenanoparticles) and/or a solvent (e.g., an organic solvent or a mixturethereof, NH₃, H₂O, a C₁-C₁₀ alcohol, cycloalkane, etc.; see U.S. Pat.Nos. 7,422,708, 7,294,449, and 7,485,691, and U.S. patent applicationSer. Nos. 11/867,587 and 12/131,002 [Attorney Docket Nos. IDR0884 andIDR1263, respectively], filed on Oct. 4, 2007 and May 30, 2008,respectively, the relevant portions of each of which are incorporatedherein by reference). The nanoparticles, or nanocrystals, of suchformulations may be conventionally passivated with one or moresurfactants or surface ligands such as alkyl, aralkyl, alcohol, alkoxy,mercaptan, alkylthio, carboxylic acid, and/or carboxylate groups. In thealternative, the nanoparticles/nanocrystals may be unpassivated.

In other embodiments, the semiconductor ink may comprise one or moresemiconductor compounds (e.g., a [doped] Group IV compound such as SiGeor SiC, III-B compounds such as GaAs, chalcogenide semiconductors suchas CdS, ZnO and ZnS, organic semiconductors, etc.), and/or one or moresemiconductor nanoparticles (e.g., Si, Ge, SiGe, etc.), along with asolvent in which the nanoparticles/compounds are soluble or suspendable(e.g., a C₆-C₂₀ branched or unbranched alkane that may be substitutedwith one or more halogens, a C₅-C₂₀ cycloalkane such as cyclohexane,cyclooctane or decalin, a C₆-C₁₀ aromatic solvent such as toluene,xylene, tetralin, a di-C₁-C₁₀ alkyl ether having a total of at least 4carbon atoms, and/or a C₄-C₁₀ cyclic alkyl ether such as tetrahydrofuranor dioxane, etc.). The ink formulation may also comprise a surfacetension reducing agent, a surfactant, a binder and/or a thickeningagent. However, such additives or agents may be omitted. Variousexemplary ink formulations, methods for making such ink formulations,and methods of forming conductive structures and/or layers from suchinks are described in U.S. Pat. Nos. 7,314,513, 7,498,317, 7,422,708,7,294,449, 7,485,691, 7,491,782, and in co-pending U.S. patentapplication Ser. Nos. 10/616,147, 11/373,696, 11/452,108, 11/888,949,11/888,942, 11/867,587, and 12/131,002 (Attorney Docket Nos. KOV-004,KOV-004-D2, IDR0502, IDR0742, IDR0743, IDR0884, and IDR1263,respectively), filed on Jul. 8, 2003, Mar. 10, 2006, Jun. 12, 2006, Aug.3, 2007, Aug. 3, 2007, Oct. 4, 2007, and May 30, 2008, respectively, therelevant portions of which are incorporated herein by reference.

In some embodiments, the (upper) capacitor electrode(s) 160 may beprinted as a mixture of two or more metal precursors, or alternatively,of one or more metal precursors, and one or more semiconductorprecursors. In other embodiments, two or more metal inks may besuccessively printed and dried as laminated layers. The mixtures and/orlaminates can be optionally heated or otherwise reacted during or afterformation to form the (semi)conductive layer 160.

The printed metal-containing/precursor ink may be dried by heating thesubstrate at a temperature and for a length of time sufficient to removeany solvent in the ink. Temperatures for removing solvents range fromabout 80° C. to about 150° C., or any range of temperatures therein(e.g., from about 100° C. to about 120° C.). The lengths of time forremoving solvents from a printed ink within these temperature ranges arefrom about 1 second to about 10 minutes, 10 seconds to about 5 minutes,or any other range of times therein (e.g., from about 30 seconds toabout 5 minutes, or about 1 minute to 3 minutes, etc.). Heating may takeplace on a conventional hotplate or in a conventional furnace or oven.Optionally, the heating may occur in an inert atmosphere as described inco-pending U.S. patent application Ser. No. 11/888,949 (Attorney DocketNo. IDR0742), filed Aug. 3, 2007, the relevant portions of which areincorporated herein by reference.

After the metal-containing ink has been dried to remove the solvent, theremaining material may be subject to an annealing process (e.g., curing)at a temperature and for a length of time sufficient to obtain desiredelectrical and/or physical properties, as well as proper adhesion to theunderlying dielectric layer. Annealing temperatures range from about100° C. to about 300° C., or any range of temperatures therein (e.g.,from about 150° C. to about 250° C., etc.). The annealing time generallyranges from about 1 minute to about 2 hours. In preferred embodiments,the metal-containing film is annealed from about 10 minutes to about 1hour, or any range of values therein (e.g., from about 10 to about 30minutes, etc.).

In various embodiments, annealing occurs in a furnace or oven, andoptionally in an inert or reducing atmosphere. For example, themetal-containing precursor film may be exposed to a reducing agent, andheated at a temperature ranging from greater than ambient temperature toabout 200-400° C., depending on the substrate. This process hasparticular advantages in embodiments where the substrate cannot beprocessed at a relatively high temperature (e.g., aluminum foil, apolycarbonate, polyethylene and polypropylene esters, a polyimide,etc.). A sealable oven, furnace, or rapid thermal annealing furnaceconfigured with a vacuum source and reducing/inert gas sources may beused for providing the reducing atmosphere and heat (thermal energy) forheterogeneous reduction. In other embodiments, the metal precursor filmmay be thermally decomposed to the elemental metal using a heat source(e.g., a hotplate) in an apparatus in which the atmosphere may becarefully controlled (e.g., a glove box or dry box). Suchannealing/reducing processes and alternatives thereof are described inco-pending U.S. patent application Ser. Nos. 11/888,949, 12/175,450, and12/131,002, respectively filed on Aug. 3, 2007, Jul. 17, 2008, and May30, 2008 (Attorney Docket Nos. IDR0742, IDR1052, and IDR1263,respectively), the relevant portions of which are incorporated byreference herein.

In some implementations, forming the capacitor electrode(s) may comprisedepositing a semiconductor layer/component (e.g., an element pre-cursorink comprising one or more [doped] Group IVA elements, such as siliconand/or germanium, a “III-V” material such as GaAs, and/or an organic orpolymeric semiconductor) at a thickness of from 50 to 200 nm. Suitableliquid-phase Group IVA element precursor inks and methods for printingsuch inks are disclosed in U.S. Pat. No. 7,498,317 and in co-pendingU.S. patent application Ser. Nos. 10/616,147 and 11/867,587,respectively filed Jul. 8, 2003 and Oct. 4, 2007 (Attorney Docket Nos.KOV-004 and IDR0884, respectively), the relevant portions of each ofwhich are incorporated herein by reference.

In some embodiments, the (semi)conductive layer may be formed byelectro(less) plating processes. In these embodiments, a printed metallayer (e.g., Pd, Pt, Co, etc.) can serve as a seed layer for electrolessdeposition or electroplating of other metals (e.g., Ag, Cu, Ni, etc.)and/or forming a metal silicide if so desired. A conductive metal (e.g.,bulk conductive metal) may be plated onto the metal seed layer and/oronto a metal silicide. The resulting structure can be subsequentlyannealed to improve the electrical contact between the silicide and theplated metal. A cleaning and/or surface roughening step may be appliedto the dielectric layer, and/or the dielectric layer may be etchedbefore printing the metal ink to improve the adhesion of the platedmetal to the dielectric layer. Plating the conductive metal may compriseeither electroless plating or electroplating. In these embodiments, theink used to form the seed layer of metal may be a nanoparticle and/orcompound-based metal in such as a PdCl₂-containing ink. In otherembodiments, the seed layer may comprise metal nanoparticles comprisingcobalt, nickel, platinum, palladium, titanium, tungsten or molybdenum.However, in preferred embodiments, the seed layer comprises palladium.The conductive metal may comprise Al, Ag, Au, Cu, Pd, Pt, Ni, Cr, Mo, W,Ru, Rh, and alloys and/or mixtures thereof. Optionally, the bulkconductive metal may be further annealed to improve one or more physicaland/or electrical characteristics. Exemplary methods of printing metalvia seed printing and plating are described in detail in U.S. patentapplication Ser. Nos. 12/175,450 and 12/243,880 (Attorney Docket Nos.IDR1052 and IDR1574, respectively), respectively filed on Jul. 17, 2008and Oct. 1, 2008, the relevant portions of which are incorporated hereinby reference.

It is generally desirable to increase the frequency response of thecapacitor (e.g., MOS capacitor circuit) used in asurveillance/identification device, and provide a low series resistancefor the circuitry in the device. This enables high frequency operation(e.g., in the range of 125 KHz and above, including, for example, 8.2MHz or 13.56 MHz). To achieve sufficiently low series resistance and/orincreased frequency response, the material used to form the uppercapacitor electrode can be recrystallized. The recrystallization processmay improve the carrier mobility and/or dopant activation of theconductive layer/electrode. Mobilities approaching 10 cm²/vs and highermay be required for low dissipation and/or effective high Q. Lowdissipation generally requires low series resistance, preferably lessthan 5 ohms for the entire circuit, along with a large parallelresistance (generally provided by a low leakage dielectric) of at least10⁴ ohms, preferably >10⁵ ohms, most preferably >10⁶ ohms. Effectivehigh Q provides low field and/or high read range operation in MHz rangefrequencies and higher. Preferred techniques for recrystallization aredescribed in U.S. Pat. No. 7,286,053, the relevant portions of which areincorporated herein by reference.

Some embodiments may comprise forming the capacitor electrodes byprinting a semiconductor layer, which may be lightly or heavily doped.Heavily doping, or alternatively, siliciding the semiconductor materialmay also increase the frequency response of thesurveillance/identification tag MOS capacitor circuit, and thus decreaseseries resistance. A doped semiconductor layer may be formed byconventionally implanting a conventional semiconductor dopant, diffusingthe dopant into the semiconductor material from a solid or vapor dopantsource, by printing a doped semiconductor or semiconductor precursorsuch as a B- or P-containing (cyclo)silane (see, e.g., U.S. Pat. No.7,498,317, and U.S. patent application Ser. No. 10/616,147, filed Jul.8, 2003 [Attorney Docket No. KOV-004], the relevant portions of whichare incorporated herein by reference), and/or by laser forward transferof a doped semiconductor layer or dopant diffusion source layer.

In other embodiments, it may be desirable to provide a relatively lowlevel of doping (a concentration of <5×10¹⁸ cm⁻³ electrically activedopant atoms) in the bulk of the active semiconductor layer to controlthe CV slope of the surveillance/identification device, and also reducethe series resistance of the semiconductor component. This may result inhigher Q and/or higher frequency operation (see, e.g., U.S. Pat. No.7,286,053, the relevant portion of which is incorporated herein byreference).

v. Forming the Antenna and/or Inductor

According to embodiments of the present method, an antenna and/orinductor may be formed on the structure and coupled with, orelectrically connected to, the capacitors (e.g., lower capacitorelectrode and/or upper capacitor electrode) and the electricallyconducting strap to form the surveillance and/or identification tag ordevice. The antenna and/or inductor may comprise the antenna, theinductor, or both. In the first general method, as shown in FIGS. 5A-5B,the antenna and/or inductor 170 (which may include contact pad regions172 and 174) is formed on, and is electrically connected to, the uppercapacitor electrode 160 and the strap 120. FIG. 5B shows across-sectional view of the antenna formed on the upper capacitorelectrode and strap along the A-A′ axis of FIG. 5A. In exemplaryembodiments, a first interconnect/contact pad 172 (an “outer contactpad” as shown in FIGS. 5A and 5B) is formed on the antenna/inductor toelectrically contact the electrically conducting strap 120 where it isnot covered by the first dielectric film 132. Similarly, a secondinterconnect/contact pad 174 (an “inner contact pad” as shown in FIGS.5A and 5B) may also be formed on the antenna/inductor to electricallycontact the upper capacitor electrode 160. In exemplary embodiments, theinterconnect/contact pads 172/174 may comprise a metal bump oranisotropic conductive paste (ACP).

In general, the antenna/inductor may be formed using any of the methodsdescribed herein. The antenna/inductor may be formed with any shape andsize suitable for placement on the tag or device, and can be made usingany of the conductive materials described herein. For example, theantenna and/or inductor may be formed with a thickness of from 1 to 100μm and a resistivity of from 0.1 to 100 μohm-cm (or any range of valuestherein), and the inductor/antenna may be formed with any shape and/orsize that will fit on the tag/device (e.g., a coil or a spiral shape,etc.).

The antenna/inductor may be formed by blanket deposition,photolithographic masking, and etching processes, as are known in theart. In one embodiment, the metal/conductor for the antenna/inductor isprinted or blanket-deposited onto a sheet, film or web of an insulativematerial, such as a polymer. If blanket-deposited onto a polymer sheet,photolithographic masking and etching provides a supported antenna thatcan be easily applied by roll-to-roll processing to the parallelcapacitor structure of FIGS. 4A-B. The antenna 170-174 can then beelectrically connected using various relatively inexpensive techniquesand/or mechanisms, such as using conductive or non-conductive adhesivesor ultrasonic or friction bonding between the antenna and the device.For example, in some embodiments, the antenna and/or inductor may beattached to the capacitors 122/160 and/or the electrically conductingstrap 120 by applying a conducting or a non-conducting adhesive to theantenna/inductor (and/or to the upper capacitor electrode 160 and thestrap 120), and then applying pressure to the antenna and/or inductorand the substrate to attach the antenna.

In some variations, the antenna/inductor may be formed on a secondsubstrate, an applicator sheet, or other backing, and subsequentlytransferred or attached to the first substrate (e.g., the substratehaving the capacitor electrodes and the strap thereon) using aconductive adhesive applied to the device and/or antenna/inductor. Inalternate embodiments, the attachment process may include variousphysical bonding techniques, such as gluing, as well as establishingelectrical interconnection(s) via wire bonding, anisotropic conductiveepoxy bonding, ultrasonics, roll-to-roll attachment, bump-bonding orflip-chip approaches. This attachment process often involves the use ofheat, time, friction or ultrasonic energy (e.g., between the contactpads of the inductor and the capacitor electrode), and/or UV exposure.Generally, temperatures of less than 200° C. (e.g., less than 150° C.,such as 90-120° C.), or any other range of values less than 200° C. areutilized. The backing or second substrate having the antenna/inductorthereon is then placed face down on the device and sufficient pressureis applied to the backside of the second substrate to cause theantenna/inductor to adhere to the device without breaking structures inthe device. The second substrate can remain or can be removed asdesired. The antenna/inductor is then electrically connected between thefirst and second capacitors and the strap.

In preferred embodiments, the antenna and/or inductor 170-174 may beformed by printing (e.g., inkjet printing, gravure printing, screenprinting, etc.) a metal or conductor ink using any of the printingprocesses described herein. The ink formulation may further be driedand/or cured (e.g., by annealing) to form the antenna/inductor 170-174.Suitable metal inks/precursor inks are described in detail herein. Insome embodiments, the antenna and/or inductor 170-174 may be printed ina continuous pattern (e.g., a unitary structure) on the upper capacitorelectrode 160 and the strap 120. However, the method is not limited assuch. On the contrary, the antenna/inductor 170-174 may comprise amulti-coil structure (e.g., 2, 3, or more coils). Such multi-coilantennas/inductors and exemplary method(s) of making the same aredescribed in detail in U.S. Pat. Nos. 7,152,804 and 7,286,053, therelevant portions of which are incorporated herein by reference.

In further embodiments, an additional support or backing layer may beadded to a surface of the antenna/inductor 170-174 to provide additionalmechanical support, stability, and/or protection to the device,particularly during subsequent processing steps. Such a backing layermay be added by lamination to paper or a flexible polymeric material(e.g., polyethylene, polypropylene, polyvinyl chloride,polytetrafluoroethylene, a polycarbonate, an electrically insulatingpolyimide, polystyrene, copolymers thereof, etc.) with the use of heatand/or an adhesive. Where the backing comprises an organic polymer, itis also possible to apply the backing layer from a liquid precursor bydip coating, extrusion coating or other thick film coating technology.In addition to providing mechanical support to the device, a supportand/or backing layer may also provide an adhesive surface for subsequentattachment or placement of the surveillance/identification device ontoan article to be tracked or monitored.

vi. Forming the Passivation Layer

Although not shown in FIGS. 3A-5B, in some embodiments, the presentmethod(s) may further comprise forming a passivation layer over thestructures on the substrate (e.g., the antenna/inductor, the capacitorelectrodes, the electrically conducting strap, etc.). Forming apassivation layer may inhibit or prevent the ingress of water, oxygen,and/or other species that might cause degradation or failure of theintegrated circuitry/device. Suitable materials for forming thepassivation layer, as well as exemplary characteristics (e.g., length,width, thickness, etc.) are described in detail with regard to exemplarydevices with multiple capacitors (see, e.g., the section(s) entitled,“The Passivation Layer” herein).

The passivation layer may be formed by coating the upper surface of thestructure with one or more inorganic barrier layers such as apolysiloxane and/or a nitride, oxide and/or oxynitride of silicon and/oraluminum, and/or one or more organic barrier layers such as parylene, afluorinated organic polymer or other barrier material known in the art.In some variations, the passivation layer may comprise an underlyingdielectric layer, which may be formed using any of the methods describedherein. The underlying dielectric layer may be formed from a materialhaving lower stress than that of the overlying passivation layer. Toillustrate, the underlying dielectric layer may comprise an oxide (e.g.,SiO₂, TEOS, undoped silicate glass [USG], fluorosilicate glass [FSG],borophosphosilicate glass [BPSG], etc.), and the passivation layer maycomprise silicon nitride or a silicon oxynitride. In some embodiments,the passivation layer may have a thickness that is slightly greater thanthe thickness of the dielectric layer(s) separating various activecomponents of the circuit (e.g., dielectric layer 130/132).

A Second Exemplary Method for Making Devices with Parallel Capacitors

A second general method for making a surveillance and/or identificationdevice with capacitors connected in parallel is discussed herein withregard to FIGS. 6A-9B. FIGS. 6A and 6B show top-down and cross-sectionalviews, respectively, of a substrate 210 having an antenna and/orinductor 270 formed thereon. Specifically, FIG. 6B shows across-sectional view of FIG. 6A along the A-A′ axis. As with the firstexemplary method, the second exemplary method for making devices withparallel capacitors may also include a conductive substrate, asemiconductive substrate, or an insulating substrate. However, invarious embodiments, insulating substrates are preferred. In someimplementations including a conductive substrate, the substrate may haveone or more insulating layers thereon, as described herein and as shownin FIG. 3C.

i. Forming the Antenna and/or Inductor

As shown in FIGS. 6A-B, in the second exemplary method, an antennaand/or inductor 270 is formed on the substrate 210. The antenna/inductormay include any conducting material(s) described herein and be formedaccording to any of the methods disclosed herein for forming a patternedlayer or feature. In exemplary embodiments, an interconnect pad and/orcontact pad 272 may be formed at one end of the antenna/inductor 270 toprovide an interconnection site for a subsequently formed electricallyconducting strap (e.g., structure 220 of FIG. 9A) to electricallyconnect the inductor/antenna 270 to the upper capacitor electrode (e.g.,structure 260 of FIG. 9A). In addition, a second interconnect pad and/orcontact pad 274 may also be formed at one end of the antenna toelectrically contact a subsequently formed lower capacitor electrode(structure 250 of FIG. 7B).

Although not shown in FIGS. 6A-9B, in some variations, the secondinterconnect/contact pad 274 may also serve as the lower capacitorelectrode. In such embodiments, the antenna does not have to be formed(e.g., by printing) on the substrate. On the contrary, in someembodiments, the substrate comprises a conductive substrate, and afterthe other structures (e.g., dielectric films, capacitor electrodes, anelectrically conducting strap, etc.) are formed on the substrate, theantenna and the contact pads (including the contact pad/lower capacitorelectrode 274) can be patterned and etched from the conductivesubstrate. Exemplary methods for forming the antenna from anelectrically conducting substrate are described in detail in U.S. Pat.Nos. 7,152,804 and 7,286,053.

ii. Forming the Interlayer Dielectric Film

Referring now to FIG. 6C, an interlayer dielectric film 230 (ILD) may beformed on the antenna/inductor 270 and the substrate 210. At least onecontact hole 234 is formed in the dielectric film as shown in FIG. 6D(e.g., over contact pad 274) to facilitate electrical connection withthe first and second parallel capacitors that will be subsequentlyformed. The resulting ILD pattern 232 is shown in FIG. 6D. Inembodiments where the connection pad 274 serves as the lower capacitorelectrode, the contact hole or opening in the dielectric film (e.g.,structure 234 of FIG. 6D) may be relatively small. The dielectric film230/232 and the contact hole 234 may be formed using any of thetechniques described herein for forming interlayer dielectrics (e.g.,dielectric layer 130/132 in FIGS. 3B-5B) and openings (e.g., the spacebetween dielectric layer portions 130 and 132 in FIGS. 3B-5B in whichcapacitor dielectric layer 140 is formed). For example, the dielectriclayer 230 may be blanket deposited or coated over the entire structureas shown in FIG. 6C, using any of the techniques described herein. Thedielectric film 230 may then be subsequently etched to form contact hole234 exposing the contact pad 274, as shown in FIG. 6D. Alternatively, inexemplary implementations, the dielectric layer 232 may be selectivelyprinted onto the structure shown in FIG. 6B in a predetermined patternto include the contact hole 234 therein.

iii. Forming the Lower Capacitor Electrode

FIG. 7A shows a top-down view of a lower capacitor electrode 250 formedon the substrate. FIG. 7B shows a cross-sectional view of FIG. 7A alongthe A-A′ axis. In general, the lower capacitor electrode 250 is formedin the contact hole (e.g., structure 234 of FIG. 6D), on the connectionor interconnect pad 274 of the antenna/inductor 270. The lower capacitorelectrode 250 may also be formed on portions of the interlayerdielectric film 232 adjacent to pad 274. The lower electrode may includeany of the conductive materials described herein and be formed using anyof the techniques described herein for forming conductive materials. Invariations in which the contact pad 274 of the antenna serves as thelower capacitor electrode, the step of forming the lower capacitorelectrode may be eliminated or combined with the step of forming theantenna.

Embodiments where the contact pad 274 serves as the lower capacitorelectrode may be advantageous because this method eliminates a printingstep (e.g., to separately form the lower capacitor electrode) andgenerally results in a thinner device or tag. On the other hand,embodiments where the lower capacitor electrode 270 is formed on theantenna/contact pad 274 may be advantageous because forming the lowercapacitor electrode in a separate step provides greater control over thesize, shape, and characteristics of the electrode, and thus over thecapacitance ratio of C1 to C2 (see FIG. 1). For example, when the lowercapacitor electrode is printed, it can have a greater area relative tothe area of the contact pad 274. In addition, the lower capacitorelectrode can be formed (e.g., by printing) using a different materialthan that used to form the antenna/contact pad 274. This allows greaterflexibility with regard to the characteristics of the capacitor, andallows a tag or device to be customized for a particular purpose.

iv. Forming the Capacitor Dielectric Film Layers

Referring now to FIGS. 7C and 7D, a relatively thin dielectric film 240is formed on at least part of the lower capacitor electrode 250, and arelatively thick dielectric film 280 is formed on the thin dielectricfilm 240 and portions of the interlayer dielectric film 232. As shown inFIG. 7D, the thick dielectric film 280 has at least one hole formedtherein to expose a portion of the underlying thin dielectric film 240.The thin dielectric film 240 may be formed using any of the growth ordeposition techniques described herein (e.g., thermal or chemicaloxidation and/or nitridization, blanket deposition, coating, printing,etc.). The thick dielectric film 280 and the contact hole therein may beformed by blanket depositing a dielectric material and then etching thedielectric to form the contact hole exposing the thin dielectric film240. In other embodiments, the thick dielectric film 280 is formed byselectively printing the dielectric material (e.g., printing adielectric precursor ink in a predetermined pattern and curing, etc.) sothat the contact hole is formed therein. In one embodiment, the thindielectric film 240 is grown on the lower electrode 250 (e.g., bythermal or chemical oxidation, anodization, etc.), and the thickdielectric film 280 is deposited on the structure (e.g., by coating,blanket deposition, printing, etc.). Suitable dielectric materials arediscussed in detail herein.

v. Forming the Upper Capacitor Electrode

FIG. 8A shows a top-down view of an upper capacitor electrode 260 formedon or over the thin and thick capacitor dielectric films 240 and 280,respectively. FIG. 8B shows a cross-sectional view of FIG. 8A along theA-A′ axis. In general, the upper capacitor electrode 260 may be formedby printing or any other technique described herein for formingconductive structures. The upper capacitor electrode 260 is capacitivelycoupled to the lower capacitor electrode 250 through thin dielectricfilm 240 and thick dielectric film 280, thereby forming first and secondcapacitors C1 and C2, connected in parallel. In general, the secondcapacitor includes the thick capacitor dielectric film 280, and hasgreater capacitance than the first capacitor (defined by the opening inthe thick capacitor dielectric film 280 and/or the capacitive couplingthrough only the thin dielectric film 240).

In preferred embodiments, the thin dielectric film 240 is formed suchthat its thickness is from 20 to 1,000 Å, or any range of valuestherein. In contrast, the thick dielectric film 280 preferably is formedsuch that its thickness is from 2,000 to 20,000 Å, or any range ofvalues therein. In certain implementations, the thick dielectric film280 may have a thickness in the range of 3,000 to 5,000 Å. Furthermore,the opening in the thick dielectric film 280 formed over the lowercapacitor electrode 250 is formed with dimensions that are not greaterthan 20% of the area between the upper and lower capacitor electrodescontaining the thick dielectric film 280. Preferably, the opening is notgreater than 5% of the area between the upper and lower capacitorelectrodes 250/260, although any percentage between 5% and 20% may beacceptable in various embodiments.

The relatively thin capacitor dielectric 240 is preferably designed andfabricated such that application of a deactivating radio frequencyelectromagnetic field induces a voltage differential in the capacitoracross the dielectric layer that will deactivate the tag/device. In manyembodiments, a voltage differential of about 4 to about 50 V, preferablyabout 5 to less than 30 V, more preferably about 4 to 15 V or anydesired range of endpoints therein, is sufficient to cause breakdown ofthe dielectric layer to a shorted state (or to change the capacitancesuch that the tag circuit no longer resonates at the desired frequency).Thus, in exemplary embodiments, the relatively thin capacitor dielectricfilm 240 is formed with (i) a thickness of from 50 to 400 Å and/or (ii)a breakdown voltage of from about 4 to about 15 V (depending on Q, thedielectric film thickness, etc.).

vi. Forming the Electrically Conducting Strap

As shown in FIG. 8C, a contact hole 275 is formed in the interlayerdielectric film 232 (e.g., by photolithographic masking and etching, byselective placement of one or more drops of wet etchant using amicrosyringe, etc.) to expose the second interconnection/contact pad 272of the antenna/inductor 270 such that portions of the dielectricmaterial cover and/or remain on the antenna 270/272 and/or substrate 210(see, e.g., dielectric film 234 of FIG. 8C). The resulting dielectricpattern is shown in cross-section as structures 234 and 232 in FIG. 8C.

As shown in FIG. 9A, an electrically conducting strap 220 is formed onthe device to provide electrical communication between the capacitors(e.g., upper electrode 260) and the exposed interconnect/contact pad 272of the antenna/inductor 270. FIG. 9B shows a cross-sectional view ofFIG. 9A along the A-A′ axis. The electrically conducting strap 220 canbe formed using any of the techniques described herein for formingelectrically conductive features. In embodiments where the interconnectpad 274 serves as the lower capacitor electrode and the contact hole inthe interlayer dielectric film 232 formed by masking and etching, theelectrically conducting strap 220 can be formed at the same time as theupper capacitor electrode 260.

vii. Forming the Passivation Layer

Although not shown in FIGS. 6A-9B, as with the first exemplary method,in some variations, the second exemplary method may further compriseforming a passivation layer over the structures on the substrate asdescribed herein (e.g., the capacitor electrodes, the capacitordielectric layers, the electrically conducting strap, etc.).

A Third Exemplary Method for Making Devices with Parallel Capacitors

A third exemplary method for making a device with parallel capacitors isshown in FIGS. 10A and 10B. This embodiment is substantially similar tothe method shown in FIGS. 6A-9B, with slight modifications, primarily tothe step(s) for forming the relatively thin capacitor dielectric film(e.g., structure 340) and the step(s) for forming the strap. Thus, inthe third exemplary method, the antenna/inductor 310, the interlayerdielectric layer 332, and the lower capacitor electrode 350 are formedon the substrate using any of the methods as described herein.

i. Forming the Relatively Thick and Relatively Thin Dielectric Layers

As shown in FIG. 10A, in exemplary embodiments, a relatively thickdielectric film 380 is formed on the interlayer dielectric film 332 andon portions of the lower capacitor electrode 350. A hole or opening isformed in the relatively thick dielectric film 380 to expose a portionof the lower capacitor electrode 350, either by printing a patterneddielectric film 380 that includes the opening or by forming the openingby photolithography and etching. Next, a relatively thin dielectric film340 is selectively formed (e.g., by thermal growth) on the lowercapacitor electrode 350 only in the opening in the thick dielectriclayer 380. Then, an upper capacitor electrode 360 is formed on therelatively thick dielectric film 380 and the relatively thin dielectricfilm 340, as described herein.

ii. Forming the Device

Referring again to FIG. 10A, the opening in the dielectric layer 332/334over antenna pad 372 and the electrically conducting strap 320 areformed in the same manner as described for the embodiment(s) shown inFIGS. 8C and 9A-B. Alternatively, the strap 320 may be formed on anapplicator sheet or other backing (e.g., by blanket deposition andphotolithographic masking/etching, cutting, or any printing processdiscussed herein), and subsequently transferred and/or attached to thetag circuit (e.g., by a roll-to-roll attachment process, apick-and-place operation, etc.). In these embodiments, the attachmentprocess may include various physical bonding techniques, such as gluing,as well as establishing electrical interconnection(s) via anisotropicconductive epoxy bonding, ultrasonics, bump-bonding or flip-chipapproaches. This attachment process may involve the use of heat, time,friction or ultrasonic energy (e.g., between the contact pads of theinductor and the capacitor electrode), and/or UV exposure. Generally,temperatures of less than 200° C. (e.g., less than 150° C., 90-120° C.,or any other range of values less than 200° C.) are utilized. Theelectrically conducting strap is placed face down on the device, andsufficient pressure is applied to the backside of the substrate 310 tocause the strap to adhere to the device. The backing layer 390 canremain or can be removed as desired. The strap is then electricallyconnected between the first and second capacitors (e.g., C1 and C2 ofFIG. 1) and the antenna/inductor (e.g., at contact pad 372).

Exemplary Methods for Making Devices with Series Capacitors

Embodiments of the present invention concern methods of making asurveillance and/or identification device with capacitors connected inseries. An exemplary embodiment is described with reference to FIGS. 11and 12. Specifically, FIG. 12 shows a top-down view of an exemplarydevice with capacitors connected in series, and FIG. 11 shows across-sectional view of the device along the A-A′ axis of FIG. 12.

i. Preparing the Substrate

As shown in FIG. 11, a first dielectric film or layer 540 is formed overa substrate 510. Although the substrate may comprise any materialdescribed herein, the substrate 510 preferably comprises an electricallyconductive substrate (e.g., a metal sheet or foil) as described indetail herein. For example, in various embodiments, the metal of thesubstrate may comprise aluminum, titanium, copper, silver, chromium,molybdenum, tungsten, nickel, gold, palladium, platinum, zinc, iron,steel (e.g., stainless steel) or any alloy thereof In suchimplementations, the metal for the conductive substrate may be chosen atleast in part based on its ability to be anodized to form an effectivecapacitor dielectric. In exemplary embodiments, the substrate may have anominal thickness of from 5-200 μm (preferably 20-100 μm in thoseembodiments in which a high Q is advantageous) and/or a resistivity of0.1-100 μohm-cm (preferably 0.5-80 μohm-cm). Additionally, prior tosubsequent processing, the conductive substrate may be conventionallycleaned and/or smoothed as described herein.

In preferred implementations, the capacitors in series share theconductive substrate (e.g., metal sheet or metal foil) as a common lowercapacitor electrode. However, in one alternate embodiment (not shown inFIGS. 11-12), the lower capacitor electrodes may be formed on anon-conductive substrate, and the first dielectric film 540 can beformed on the lower capacitor electrodes using any of the methodsdescribed herein. However, in this alternate embodiment, a conductiveinterconnection is also formed between the lower capacitor electrodes.

ii. Forming the First Dielectric Film Layer

Referring again to FIG. 11, a first dielectric film or layer 540 isformed over the (conductive) substrate 510. In general, the capacitorsin series share the first dielectric film as a capacitor dielectric. Inexemplary embodiments, the first dielectric film 540 is formed byoxidizing and/or nitriding the conductive substrate (e.g., by anodizingthe conductive substrate 510 or by depositing a liquid oxide/nitrideprecursor on the conductive substrate 510 and curing the precursor) asdescribed herein. However, in alternate embodiments, the firstdielectric film 540 may be formed by printing, or by blanket depositingor coating, then photolithography and etching, as described herein.Although not shown in FIG. 11, in some variations, the dielectric layer540 may optionally be selectively deposited or etched to expose one ormore regions of the conductive substrate 510.

iii. Forming the Upper Capacitor Electrodes

Referring still to FIG. 11, a plurality of capacitor electrodes (e.g.,E1 and E2, structures 535 and 530, respectively) are formed on the firstdielectric film 540. In general, the upper capacitor electrodes 530/535may be formed by depositing a conductive material (e.g., a metal orother conductive ink, semiconductor ink, etc.) in the contact holes oropenings in the relatively thick dielectric film 580 using any methoddescribed herein. In preferred embodiments, and as shown in FIG. 11, thecapacitor electrodes are capacitively coupled to the conductivesubstrate, and are physically isolated from each other. In exemplaryembodiments, the capacitor electrodes 530/535 are formed in and/or bythe same fabrication process, and may be formed such that the thicknessis from 30 nm to 5,000 nm, or any range of values therein.

iv. Forming the Relatively Thick Dielectric Film

In exemplary variations, a relatively thick dielectric film 580 mayoptionally be formed on the first dielectric film 540 before forming thecapacitor electrodes 530/535 using any of the techniques describedherein (e.g., blanket depositing or coating, selective printing, etc.).In general, the relatively thick dielectric film 580 has a greaterthickness than the first dielectric film 540, and has a plurality ofcontact holes or openings formed therein for the capacitor electrodes530/535. If the relatively thick dielectric film 580 is sufficientlythick, the extra capacitance between the portions of the upper capacitorelectrodes (e.g., P1 and P2) and the substrate 510 can be kept wellbelow the C1 and C2 capacitances. In some embodiments, the capacitorelectrodes (e.g., E1 and E2) can be selectively printed directly on thedielectric film C1/C2 prior to (or without) forming the relatively thickdielectric film 580. However, formation of the relatively thickdielectric film 580 prior to formation of the capacitor electrodes530/535 is preferred. In exemplary embodiments, the electrodes areformed with contact pads P1 and P2 on a portion of the relatively thickdielectric film 580, for connection to the subsequently formed inductorand/or antenna.

v. Forming an Interlayer Dielectric Film

As shown in FIG. 11, in exemplary embodiments, a second dielectric film(e.g., an interlayer dielectric film [ILD]) 560 is deposited and/orpatterned over the upper capacitor electrodes 530/535 and the relativelythick dielectric film 580 such that contact holes or connection openingsare formed over the contact pads P1 and P2 of the upper capacitorelectrodes 530/535. The ILD 560 and contact holes therein may be formedusing any of the methods described herein for forming relatively thickdielectric layers (e.g., coating and photolithographic etching,selective printing, etc.). Forming the ILD 560 permits assembly of thedevice onto an antenna and/or inductor with electrical contacts at thecontact pads P1 and P2, without requiring any direct electricalconnection to the conductive substrate 510. In general, the ILD 560 isformed with a greater thickness than the first dielectric film 540. Whenthe ILD 560 is formed (e.g., by printing, etc.), the thickness of theILD 560 near the exposed portions of the contact pads P1 and P2 can berelatively small. This may further facilitate attachment of the antenna.

vi. Forming the Antenna and/or Inductor

As shown in FIGS. 11 and 12, an antenna and/or inductor 570 is formed onthe device and is electrically connected to each of the capacitorelectrodes (e.g., via structures 575 connected at P1 and P2). Theantenna/inductor 570/575 may be formed on or over portions of the ILD560 and the upper capacitor electrodes 530/535 using any of the methodsand/or materials described herein. It should be noted that many otherembodiments and/or variations may be apparent to one of skill in the artfrom the present disclosure. Thus, the present invention is not limitedto the embodiments described herein. For example, the sequence of stepsto form the circuit structures may be reversed, the circuit elements maybe formed laterally, etc., rather than using the order of stepsdisclosed in the exemplary embodiments above.

Exemplary Surveillance and/or Identification Devices with MultipleCapacitors

As previously discussed with regard to exemplary methods of makingdevices, the surveillance/identification devices of the presentinvention may have a plurality of capacitors connected in parallel (see,e.g., the circuit diagram of FIG. 1) and/or the devices may have aplurality of capacitors connected in series (see, e.g., the circuitdiagram of FIG. 2). Exemplary embodiments and variations of such devicesare discussed below.

A First Exemplary Surveillance and/or Identification Device withParallel Capacitors

A first exemplary surveillance and/or identification tag 100 withcapacitors connected in parallel is shown in FIGS. 5A and 5B (top-downand cross-sectional views, respectively).

i. The Substrate

In this embodiment, a surveillance and/or identification device 100comprises an electrically conducting strap or feature 120 on a substrate110. In general, the substrate 110 may comprise any suitable insulating,conductive, or semiconductive material known in the art. For example,the substrate may comprise a wafer, plate, disc, sheet and/or foil of asemiconductor (e.g. silicon), a glass, a ceramic, a dielectric, plasticand/or a metal, preferably a member selected from the group consistingof a silicon wafer, a glass plate, a ceramic plate or disc, a plasticsheet or disc, metal foil, a metal sheet or disc, and laminated orlayered combinations thereof. Although suitable substrates for thisembodiment include conductive and semiconductive substrates, inpreferred embodiments, the substrate comprises an insulating material(e.g., a plastic sheet or web, etc.).

In some variations, the substrate may further include one or moredielectric, buffer, planarization, passivation, insulating and/ormechanical support layers (such as a polyimide or other polymer, siliconand/or aluminum oxide, etc.) thereon. Such layers may themselves bepatterned and/or have patterned semiconductor, conductor and/ordielectric features thereon. In some implementations, plastic and metalsubstrates may further contain a planarization layer thereon to reducethe surface roughness of the substrate. In addition, the electricallyconductive substrates (e.g., comprising or consisting essentially of ametal) generally have an insulator layer (e.g., a layer of thecorresponding metal oxide) and/or a substantially amorphous conductivelayer (e.g., a transition metal nitride, such as titanium nitride,tantalum nitride, or tungsten nitride) thereon.

In further embodiments, the substrate may be part of the device circuit,and thus may include a conductive material therein (see, e.g., FIG. 3C).As shown in FIG. 3C, the substrate 110 may comprise a multi-layerstructure, including a metal or other conductive material 102 with acorresponding oxide or blanket deposited/coated insulator 104 a thereon.Optionally, the substrate may comprising a backing layer 104 b on themetal layer 102, which may comprise the same material as the insulatinglayer 104 a. In preferred embodiments, the metal layer 102 comprisesaluminum or stainless steel foil with SiO₂ deposited or coated thereon(e.g., layer 104 a on layer 102). In other embodiments, the metal layer102 may comprise aluminum foil with anodized Al₂O₃ thereon (e.g., layers104 a and 104 b).

ii. The Electrically Conducting Strap

Exemplary surveillance/identification devices with parallel capacitorsfurther comprise an electrically conducting strap or other electricallyconducting feature, which provides electrical communication between thecapacitors and the inductor/antenna of the device. As shown in FIG. 5B,in some preferred embodiments, the strap 120 is formed on the substrate110, and the capacitors in parallel share the electrically conductingstrap as the lower capacitor electrode (e.g., as shown by identificationnumber 122 in FIGS. 5A and 5B). As further shown in the embodiment ofFIGS. 5A/5B, the electrically conducting strap 120 may be electricallyconnected to the lower capacitor electrode 122 and the inductor/antenna170 (e.g., at connection pad 172). In some variations, the strap 120 andlower capacitor electrode 122 may be a unitary structure (e.g., made inthe same processing step, for example by printing, or in a sequence ofsteps, for example by sputtering and photolithography), and may have thesame metal (or other conductive material) throughout the structure.

In general, the strap 120 may comprise any electrically conductivematerial. For example, in some implementations, the strap may comprise ametal such as aluminum, titanium, copper, silver, chromium, molybdenum,tungsten, nickel, gold, palladium, platinum, zinc, iron, or an alloythereof, such as stainless steel, TiW alloy, NiCr alloy, etc. Inexemplary embodiments, the strap consists essentially of silver, gold,copper, or aluminum (or a conductive alloy thereof). In variousembodiments, the strap may comprise the same material as the inductorand/or the upper and/or lower capacitor electrodes. However, the deviceis not limited as such. Thus, in alternate embodiments, the strap, theinductor, and the capacitor electrodes may each comprise a differentmaterial. In some implementations, dopants, siliciding components, orother work function modulation agents and/or tunneling barrier materialsmay be included in the electrically conducting strap. Such inclusion mayreduce the series resistance, increase the Q, and improve the overallperformance of the surveillance and/or identification device.

The strap 120 may have any suitable size and shape (e.g., square,rectangular, round, etc.) that will allow for placement on the device ortag. In various embodiments, the strap may have a thickness ranging from30 nm to 5,000 nm, preferably from 50 nm to 2,000 nm, and morepreferably from 80 nm to 500 nm (or any other range of values therein).

iii. Exemplary Dielectric Film Layers

The device shown in FIG. 5B comprises a first dielectric film 130 on thesubstrate 110, and also on or over a portion of the electricallyconducting strap 120 (see, e.g., structure 132 of FIG. 5B). In suchembodiments, the first dielectric film 130/132 exposes a portion of thestrap 120 and has an opening over a portion of the lower capacitorelectrode 122. In addition, the embodiment of FIG. 5B further comprisesa capacitor dielectric film 140 on the lower capacitor electrode 122 inthe opening in the first dielectric film 130/132. In general, the firstdielectric film 130/132 is unitary, and completely covers strap 120 andlower capacitor electrode 122, except for (i) the end portion of strap120 that forms an electrical connection or ohmic contact with pad 172 ofantenna/inductor coil 170 and (ii) the relatively small, generallycircular or square opening in the first dielectric film 130/132 in whichthin dielectric film 140 is formed.

In the embodiment of FIG. 5B (and variations thereof), the capacitordielectric 140 has significantly smaller thickness than the thickness ofthe first dielectric film 130. For example, the capacitor dielectricfilm 140 preferably has a thickness of from 20 to 1,000 Å. In contrast,the first dielectric film 130/132 preferably has a thickness of from2,000 to 20,000 Å. In exemplary embodiments, the first dielectric film130/132 has a thickness of from 3,000 to 5,000 Å. In general, theopening in the first dielectric film 130/132 over the lower capacitor122 is not greater than 20% of the area between the upper and lowercapacitor electrodes containing the first dielectric film 130/132.Preferably, the opening is not greater than 5% of the area between theupper and lower capacitor electrodes.

The relatively thin capacitor dielectric 140 preferably has sufficientthickness and/or breakdown voltage such that application of adeactivating radio frequency electromagnetic field induces a voltagedifferential in the capacitor across the dielectric layer that willdeactivate the tag/device (e.g., a voltage differential of about 4 toabout 50 V, preferably about 5 to less than 30 V, more preferably about4 to 15 V, or any desired range of endpoints therein) results inbreakdown of the dielectric layer to shorted state or changedcapacitance such that the tag circuit no longer resonates at the desiredfrequency. Thus, in certain embodiments, the relatively thin capacitordielectric layer has (i) a thickness of from 50 to 400 Å and/or (ii) abreakdown voltage of from about 4 to about 15 V.

In general, the dielectric film(s) may comprise any electricallyinsulative dielectric material, such as a metal or silicon oxide and/ornitride, or other ceramic or glass (e.g., silicon dioxide, siliconnitride, silicon oxynitride, aluminum oxide, tantalum oxide, zirconiumoxide, etc.), a polymer such as a polysiloxane, parylene, polyethylene,polypropylene, undoped polyimide, polycarbonate, polyamide, polyether, acopolymer thereof, or a fluorinated derivative thereof, etc. Inpreferred embodiments, the dielectric film(s) comprises or consistsessentially of aluminum oxide, silicon dioxide, and/or a correspondingoxide of the metal used to manufacture the conductive structures, suchas the lower capacitor electrode and/or the electrically conductingstrap, etc.

In some embodiments, the dielectric film(s) may comprise an inorganicinsulator. For example, the dielectric film(s) may include a metal oxideand/or nitride of the formula M_(x)O_(y)N_(z), wherein M is silicon or ametal selected from the group consisting of aluminum, titanium,zirconium, tantalum, hafnium, vanadium, chromium, molybdenum, tungsten,rhodium, rhenium, iron, ruthenium, copper, zinc, indium, tin, lanthanidemetals, actinide, metals, and mixtures thereof. In further embodiments,the inorganic insulator may comprise silicates, aluminates, and/oraluminosilicates of such metals and mixtures, where y/2+z/3 equals thecombined oxidation state of the x instances of M.

In exemplary embodiments, the dielectric film(s) may comprise or beformed from one or more spin on glasses (which may be photodefinable ornon-photodefinable, in the latter case patterned by direct printing orpost deposition lithography); polyimides (which may be photodefinableand/or thermally sensitized for thermal laser patterning, ornon-photodefinable for patterning by direct printing or post depositionlithography); BCB or other organic dielectrics such as SiLK® dielectricmaterial (SILK is a registered trademark of Dow Chemical Co., Midland,Mich.); low-k interlayer dielectrics formed by sol-gel techniques;plasma enhanced (PE) TEOS (i.e., SiO₂ formed by plasma-enhanced CVD oftetraethylorthosilicate); and laminated polymer films such aspolyethylene, polyester, or higher temperature polymers such as PES,polyimide or others that are compatible with subsequent high temperatureprocessing.

In exemplary embodiments, the dielectric film(s) may comprise an oxideand/or nitride of a Group IVA element, which may further containconventional boron and/or phosphorous oxide modifiers in conventionalamounts. Thus, the Group IVA element may comprise or consist essentiallyof silicon, in which case the dielectric film(s) may comprise or consistessentially of silicon dioxide, silicon nitride, silicon oxynitride, aborosilicate glass, a phosphosilicate glass, or a borophosphosilicateglass (preferably silicon dioxide).

iv. Exemplary Capacitor Electrodes

Referring still to the device of FIG. 5B, as discussed herein, the lowercapacitor electrode 122 is electrically connected to the electricallyconducting strap 120. Preferably, the parallel capacitors share thestrap 120 as a lower capacitor electrode 122. Thus, the lower capacitorelectrode generally comprises the same material(s) and/orcharacteristics as discussed herein with regard to the electricallyconducting strap. Additionally, the device of FIG. 5B comprises an uppercapacitor electrode 160 on the first dielectric film 130 and thecapacitor dielectric film 140. The upper capacitor electrode 160 iscapacitively coupled to the lower capacitor electrode 122 to form theparallel capacitors (e.g., C1 and C2 of FIG. 1). In general, the firstcapacitor in parallel includes the relatively thin capacitor dielectriclayer 140, and the second capacitor includes the relatively thick firstdielectric film 130. The second capacitor has much greater area than thefirst capacitor, and thus has a greater capacitance that the firstcapacitor. In some embodiments, the upper capacitor electrode 160 may beformed directly above the capacitor dielectric layer 140, such that theupper capacitor electrode 160 completely covers the dielectric layer140.

In general, the capacitor electrodes (e.g., lower and upper electrodes122/160) may comprise any suitable conductive material as describedherein, such as a metal, an alloy of two or more metals, or a conductivecompound (e.g., a refractory metal nitride and/or silicide, where therefractory metal may include Ti, Zn, Ta, Hf, Cr, Mo, W, Re, Rh, Co, Ni,Pd, Pt, etc.). In exemplary embodiments, the capacitor electrode(s)comprise a metal. For example, the upper and/or lower capacitorelectrode(s) may comprise aluminum, titanium, copper, silver, chromium,molybdenum, tungsten, nickel, gold, palladium, platinum, zinc, iron, orany alloy thereof (e.g., stainless steel, etc.). In someimplementations, the capacitor electrodes may comprise a conductivepolymer, such as a doped polythiophene, polyimide, polyacetylene,polycyclo-butadiene and/or polycyclooctatetraene; a conductive inorganiccompound film, such as titanium nitride, tantalum nitride, indium tinoxide, etc., and/or a doped semiconductor, such as doped silicon, dopedgermanium, doped silicon-germanium, doped gallium arsenide, doped(including auto-doped) zinc oxide, zinc sulfide, cadmium sulfide, etc.

In some embodiments, the upper and lower capacitor electrodes 160/122may comprise the same metal. In such embodiments, the same metalpreferably comprises or consists essentially of aluminum, silver, gold,palladium, or nickel. However, the invention is not limited as such, andthe upper and lower capacitor electrodes may also comprise differentmetals. Still, in further embodiments, the upper and/or lower capacitorelectrode may comprise the same metal as the electrically conductingstrap and/or the antenna/inductor (which also may be selected from themetals described herein).

In exemplary embodiments, the upper and/or lower capacitor electrodesmay have a nominal thickness of from 30 nm to 2,000 nm (e.g., of from 50to 2,000 nm, of from 200 to 1,000 nm, or any other range of valuestherein) and/or a resistivity of 0.1-10 μohm-cm (preferably from 0.5 to5 μohm-cm, or any other range of values therein, and in one embodiment,about 3 μohm-cm). While the capacitor electrodes may be locatedsubstantially in the center of the device (see, e.g., 122/160 of FIGS.5A/5B), they also may be located in any area of the device, inaccordance with design choices and/or preferences. Also, the capacitorelectrodes may have any desired shape, such as round, square,rectangular, triangular, etc., and with nearly any dimensions that allowthe electrode(s) to fit in and/or on the surveillance/identificationdevice. In preferred embodiments, at least one capacitor electrode(e.g., the upper capacitor electrode 160) has a dome-shaped profile.

Preferably, the capacitor electrodes have dimensions of (i) width,length and thickness, or (ii) radius and thickness, in which thethickness is substantially less than the other dimension(s). Forexample, the lower capacitor electrode may have a radius of from 25 to10,000 μm (preferably 50 to 5,000 μm, 100 to 2,500 μm, or any range ofvalues therein), or a width and/or length of 50 to 20,000 μm, 100 to10,000 μm, 250 to 5,000 μm, or any range of values therein. Similarly,the upper capacitor electrode may have a radius of from 20 to 10,000 μm(preferably 40 to 5,000 μm, 80 to 2,500 μm, or any range of valuestherein), or a width and/or length of 40 to 20,000 μm, 80 to 10,000 μm,150 to 5,000 μm, or any range of values therein.

v. The Antenna and/or Inductor

As shown in FIGS. 5A and 5B, an antenna and/or inductor 170, which mayfurther include contact pads 172/174, is electrically connected to theupper capacitor electrode 160 and the strap 120. Thus, in thisembodiment, the antenna/inductor is preferably formed on or over theother structures in the circuit or device (see, e.g., FIG. 5B).

In general, the antenna and/or inductor may comprise any conductivematerial known in the art. However, in preferred embodiments, theantenna/inductor comprises a metal. The metal may be one that iscommercially available (e.g., aluminum, copper, or any other alloythereof, such as stainless steel, etc.), and may generally comprise anyof the metals described herein with regard to conductive structures(e.g., the capacitor electrodes, the strap, a conductive substrate,etc.), and/or methods of forming the same. For example, in exemplaryembodiments, the antenna/inductor comprises or consists essentially ofaluminum, silver, or an underlying palladium layer and an overlying bulkconductor (e.g., copper, silver, etc.) plated thereon.

In exemplary embodiments, the antenna/inductor may further comprise oneor more contact/interconnect pad regions for connecting theinductor/antenna to the capacitor electrodes (e.g., contact pad region174) and/or the electrically conducting strap (e.g., contact pad region172). In exemplary embodiments, the contact pads comprise a metal bumpor anisotropic conductive paste (ACP). The contact pads of theantenna/inductor may be attached and/or affixed to the capacitorelectrodes and/or the electrically conducting strap by an adhesive,which may be either conductive or non-conductive. The antenna/inductormay comprise a continuous structure or it may be discontinuous andcomprise a first (outer) inductor coupled to one capacitor electrode anda second (inner) inductor coupled to a second capacitor electrode. Invarious embodiments, a backing and/or support layer may be attached tothe inductor. The support and/or backing layer may provide an adhesivesurface for attachment to or placement of thesurveillance/identification device to an article to be tracked ormonitored.

In exemplary embodiments, the inductor/antenna comprises a coil having aplurality of loops or rings. For clarity and illustrative purposes, theinductor shown in FIGS. 5A and 5B has two loops, rings, or coils.However, any suitable number of loops, rings, or coils may be employed,depending on application requirements and design choices/preferences.Generally, as many as can fit within design rules and manufacturingtolerances are present. The antenna and/or inductor may take any formand/or shape conventionally used for such inductors, but preferably ithas a coil or concentric spiral loop form. For ease of manufacturingand/or device area efficiency, the coil loops generally have a square orrectangular shape, but they may also have an octagonal, circular,rounded or oval shape, some other polygonal shape, or any combinationthereof, and/or they may have one or more truncated corners, accordingto application and/or design choices and/or preferences, as long as eachsuccessive loop is substantially entirely positioned between thepreceding loop and the outermost periphery of the tag/device.

Referring to FIG. 5A, the concentric loops or rings of theantenna/inductor coil 170 may have any suitable width and pitch (i.e.,inter-ring spacing), and the width and/or pitch may vary from loop toloop or ring to ring. However, in certain embodiments, the wire in eachloop (or in each side of each loop or ring) may independently have awidth or thickness of from 2 to 2,000 μm (preferably from 5 to 1000 μm,10 to 500 μm, 10 to 100 μm or any range of values therein) and a lengthof 100 to 50,000 μm, 250 to 25,000 μm, 500 to 20,000 μm, or any range ofvalues therein (as long as the lengths of the inductor wire segments donot exceed the dimensions of the surveillance/identification device).Alternatively, the radius of each wire loop or ring in the inductor maybe from 250 to 25,000 μm (preferably 500 to 20,000 μm). Similarly, thepitch between wires in adjacent concentric loops or rings of theinductor may be from 2 to 1,000 μm, 3 to 500 μm, 5 to 250 μm, 10 to 200μm, or any range of values therein. Furthermore, the width-to-pitchratio may be from a lower limit of about 1:10, 1:5, 1:3, 1:2 or 1:1, upto an upper limit of about 1:2, 1:1, 2:1, 4:1 or 6:1, or any range ofendpoints therein. In preferred embodiments, the antenna and/or inductorhas a resistivity of from 0.1 to 100 μohm-cm.

Similarly, the contact/interconnect pad(s) 172/174, which are generallyconfigured to provide electrical communication and/or physical contactwith the capacitor electrodes and/or contact with the electricallyconducting strap, may have any desired shape, such as round, square,rectangular, triangular, etc. Furthermore, the interconnect/contactpad(s) may have nearly any dimensions that allow them to fit in and/oron the surveillance/identification tag or device, and provide electricalcommunication and/or physical contact with the capacitor electrodesand/or the electrically conducting strap. Preferably, the interconnectpad(s) 172/174 have dimensions of (i) width, length and thickness, or(ii) radius and thickness, in which the thickness is substantiallysmaller than the other dimension(s). For example, the interconnect pad172/174 may have a radius or width of from 25 μm up to any radius orwidth that the tag will permit, considering the number of coils in theantenna and/or the proportion (e.g., percentage) of the integratedcircuitry or tag area that is needed for the antenna. Thus, the areadimensions (e.g., width and/or length) may be from 50 to 5,000 μm, 100to 2,000 μm, 200 to 1,000 μm, or any range of values therein.

vi. The Passivation Layer

Although not shown in FIGS. 5A and 5B, in some embodiments, the devicemay further comprise a passivation layer on or over the structure. Forexample, the device may have a passivation layer on or over the uppercapacitor electrode and the antenna/inductor (or the other structuresformed on the substrate). The passivation layer may inhibit or preventthe ingress of water, oxygen, and/or other species that might causedegradation or failure of the integrated circuitry/device. Furthermorethe passivation layer may provide some mechanical support to the device,particularly during subsequent processing steps. The passivation layeris generally conventional, and may comprise an organic polymer, such asparylene, polyethylene, polypropylene, a polyimide, copolymers thereof,a fluorinated organic polymer, or any other barrier material. In otherembodiments, the passivation layer may comprise an inorganic dielectric,such as aluminum oxide, silicon dioxide (e.g., which may beconventionally doped and/or which may comprise a spin-on-glass, siliconnitride, silicon oxynitride, polysiloxane, or a combination thereof, asa mixture or a multilayer structure).

In some variations, the passivation layer may further comprise anunderlying dielectric layer, which may comprise a material having lowerstress than the overlying passivation layer. For example, the dielectriclayer may comprise an oxide, such as SiO₂ (e.g., TEOS, USG, FSG, BPSG,etc.), and the passivation layer may comprise silicon nitride or asilicon oxynitride. In such embodiments, the passivation layer may havea thickness slightly greater than that of the underlying dielectriclayer.

In exemplary embodiments, the passivation layer generally has the samewidth and length dimensions as the surveillance/identification device.It may also have any thickness suitable for such asurveillance/identification tag or device. For example, the passivationlayer may have a thickness of from 0.5 to 100 μm, from 3 to 50 μm, 10 to25 μm, or any range of values therein.

The present device may also further comprise a support and/or backinglayer (not shown in FIG. 5B) on a surface of the inductor. The supportand/or backing layers are conventional, and are well known in thesurveillance/identification device arts (see, e.g., U.S. PatentApplication Publication No. 2002/0163434 and U.S. Pat. Nos. 5,841,350,5,608,379 and 4,063,229, the relevant portions of each of which areincorporated herein by reference). Generally, such support and/orbacking layers provide (1) an adhesive surface for subsequent attachmentor placement onto an article to be tracked or monitored, and/or (2)mechanical support for the surveillance/identification device itself.For example, the present tag/device may be affixed to the back of aprice or article identification label, and an adhesive coated or placedon the opposite surface of the tag (optionally covered by a conventionalrelease sheet until the tag is ready for use), to form a price orarticle identification label suitable for use in a conventionalsurveillance/identification tag/device system. Alternatively, thepresent device may be placed inside the article or item to be identifiedand/or tracked (for security purposes), with or without adhering thedevice to article or item.

A Second Exemplary Surveillance and/or Identification Device withParallel Capacitors

A second exemplary surveillance device 200 with capacitors connected inparallel is shown in FIGS. 9A and 9B (top-down and cross-sectionalviews, respectively).

i. The Substrate

In the embodiment shown in FIG. 9B, a surveillance and/or identificationdevice 200 comprises an antenna and/or an inductor 270 on a substrate210. As discussed herein, the substrate in this embodiment may compriseany suitable insulating, conductive, or semiconductive material (e.g.,plastic sheet or web, a glass, a wafer, metal foil, etc.). However,substrates comprising an insulating material are preferred. Furthermore,the substrate in the device of FIGS. 9A and 9B may have any of thecharacteristics described herein with regard to exemplary substrates.

ii. The Antenna and/or Inductor

As shown in FIG. 9B, the antenna and/or inductor 270 of this embodimentis on the substrate 210. In addition, the antenna/inductor may furthercomprise one or more contact/interconnect pad regions for connecting tothe strap (e.g., contact pad 272) and/or the capacitor electrodes (e.g.,contact pad 274). In some embodiments, contact pad 274 may also serve asthe lower capacitor electrode. In one alternate variation, theantenna/inductor may be formed from a conductive substrate (e.g., byphotolithographic patterning and etching, etc.). Surveillance tagsand/or devices with an antenna/inductor formed from the conductivesubstrate, and methods of forming such devices are described in detailin U.S. Pat. Nos. 7,152,804 and 7,286,053, the relevant portions ofwhich are incorporated herein by reference.

In general, the antenna/inductor 270 (and the contact pad regions272/274) may have any shape, size and/or dimensions suitable forplacement on the substrate and/or connection thereto, as describedherein. Furthermore, the antenna/inductor 270 in the embodiment of FIG.9B may comprise any conductive material discussed herein, andpreferably, the antenna/inductor comprises a metal. However, inembodiments where the antenna is formed from a conductive substrate, theinductor comprises the same material as the substrate and/or the lowercapacitor electrode.

iii. Exemplary Dielectric Films

Exemplary devices with parallel capacitors generally comprise aplurality of dielectric film layers. For example, as shown in FIG. 9B,the device comprises an interlayer dielectric film 232, a firstdielectric film 280, and a relatively thin capacitor dielectric film240.

As shown in FIG. 9B, the interlayer dielectric film 232 is on or overportions of the substrate and/or the antenna/inductor, and generally hasone or more contact holes formed therein to facilitate electricalconnection from the antenna/inductor to the parallel capacitors. Forexample, there is a first contact hole in the interlayer dielectric film232 exposing the antenna pad 274, and a second contact hole in theinterlayer dielectric film 232 exposing the antenna pad 272.

The first dielectric film 280 may comprise a relatively thick capacitordielectric film, and is formed on some or all of the lower capacitorelectrode 250, the thin capacitor dielectric film 240, and optionally,on portions of the interlayer dielectric film 232. The first dielectricfilm 280 has at least one contact hole therein to expose at least aportion of the antenna and/or inductor 270 (e.g., at contact pad 272)and/or an opening over the lower capacitor electrode 250. A relativelythin capacitor dielectric film 240 is on the lower capacitor electrode250 and in the opening in the first dielectric film 280. The thicknessof the thin capacitor dielectric film 240 is significantly less than thethickness of the first dielectric film 280.

Furthermore, in exemplary embodiments, the interlayer dielectric film232 also has a greater thickness than the thickness of the relativelythin capacitor dielectric film 240.

The dielectric films of the embodiment of FIG. 9B may comprise any ofthe materials discussed herein with regard to the dielectric films(e.g., a metal oxide, silicon oxide, ceramic, glass, etc.). Furthermore,the dielectric films may have any of the dimensions and/orcharacteristics described herein. For example, the thin capacitordielectric film 240 may have a thickness of from 20 to 1,000 Å (e.g., 50to 400 Å, or any other range of values therein) and/or a breakdownvoltage of from about 4 to about 15 V, and the first dielectric film 280may have a thickness of from 2,000 to 20,000 Å (e.g., 3,000 to 5,000 Å,or any other range of values therein).

iv. Exemplary Capacitor Electrodes

As shown in the device of FIG. 9B, a lower capacitor electrode 250 is onor over the substrate and in electrical contact with the antenna and/orinductor 270 (e.g., at contact pad 274). An upper capacitor electrode260 is capacitively coupled to the lower capacitor electrode 250 throughthin dielectric film 240 and separately through thick dielectric film280 to form capacitors connected in parallel. As with the firstexemplary device shown in FIG. 5B, a first capacitor is under part(preferably, most) of the relatively thin capacitor dielectric film 240,and a second (larger) capacitor is over the relatively thick dielectricfilm 280. The electrically conducting strap 220 is configured to provideelectrical communication between the upper capacitor electrode 260 andthe antenna and/or inductor 270 (e.g., at contact pad 272). In theembodiment shown in FIG. 9B, the upper capacitor electrode 260 does notcompletely cover the capacitor dielectric layer 240, and thus one ormore portions of the capacitor dielectric layer 240 may be exposed.

The capacitor electrodes 250/260 may independently comprise any of theconductive materials and/or be formed from ink formulations as describedherein (e.g., a metal precursor ink, metal nanoparticles, a metal saltand/or metal complex, a doped or undoped semiconductor, a conductivepolymer, etc.). For example, the electrodes may comprise any of themetals described herein (e.g., aluminum, copper, silver, etc.), or analloy thereof (e.g., stainless steel). In addition, the capacitorelectrodes 250/260 may have any of the characteristics, shapes, or otherdimensions as described herein.

v. The Electrically Conducting Strap

As shown in FIGS. 9A and 9B, exemplary devices according to the secondembodiment comprise an electrically conducting strap 220 on the uppercapacitor electrode 250, the dielectric layer(s) (e.g., 240, 280, and234 of FIG. 9B) and the antenna/inductor 270/272. In general, theelectrically conducting strap 220 is configured to provide electricalcommunication between the upper capacitor electrode 260 and theinductor/antenna 270 (e.g., at connection pad 272). The strap 220 maycomprise any electrically conductive material described herein (e.g.,preferably a metal), and may have any size and/or shape describedherein. In some embodiments, the strap 220 is in direct contact with theupper capacitor electrode (e.g., 260) and/or the antenna/inductor (e.g.,pad 272). Alternatively, the strap 220 may be connected to the capacitorelectrode 260 and/or the antenna/inductor pad 272 using either aconductive or a non-conductive adhesive. Additionally, the strap 220 mayhave one or more interconnect/contact pads (e.g., a pad portion) forconnecting to a conductive structure (e.g., the capacitor electrode 260and/or the antenna/inductor 270/272).

A Third Exemplary Surveillance and/or Identification Device withParallel Capacitors

A third exemplary surveillance device with capacitors connected inparallel 300 is shown in FIGS. 10A and 10B. The embodiment of FIGS. 10Aand 10B is substantially similar to that of FIGS. 9A and 9B. Forexample, as shown in FIG. 10A, the device comprises an antenna/inductor370 on a substrate (preferably comprising an insulating material). Theantenna/inductor may also include contact pads 372 and 374. Aninterlayer dielectric layer 332 is on the antenna/inductor 370, and hascontact holes exposing the antenna contact pads 372/374. A lowercapacitor electrode 350 is on the interlayer dielectric film 332 and inthe contact hole over the contact pad 374. A first dielectric film 380is on or over the antenna and/or inductor 370 and the lower capacitorelectrode 350 and has a contact hole therein exposing a portion of thelower capacitor electrode 350 and the contact pad 372.

In contrast to the device of FIGS. 9A and 9B, the device of FIG. 10Aincludes a relatively thin capacitor dielectric film 340 on the lowercapacitor electrode 350 only in the contact hole in the first dielectricfilm 380 exposing the lower capacitor electrode 350, and not over theentire lower capacitor electrode as shown in FIG. 9B. However, aspreviously discussed with the first and second exemplary devices withparallel capacitors, the relatively thin capacitor dielectric film 340of the device of FIG. 10A also has a thickness that is significantlyless than that of the first dielectric film 380 and also the interlayerdielectric film 332. For example, in some exemplary embodiments, thethickness of the first dielectric film (e.g., structure 380) may have athickness of at least 5 times that of the relatively thin capacitordielectric film (e.g., structure 340). An upper capacitor electrode 360is formed on the device and is capacitively coupled to the lowercapacitor electrode 350 to form the capacitors connected in parallel. Anelectrically conducting strap 320 connects the upper capacitor electrode360 and the antenna/inductor at contact pad 372.

In general, the conductive structures of the device in FIG. 10A (e.g.,the antenna/inductor 370/372/374, upper and lower capacitor electrodes350/360, and the electrically conducting strap 320) may comprise any ofthe conductive materials described herein. Similarly, the dielectricfilms (e.g., interlayer dielectric film 332, the relatively thickdielectric film 380, and the relatively thin dielectric film 340) maycomprise any of the insulating materials described herein. Furthermore,the various structures of the device of FIG. 10A (e.g., the substrate,the dielectric films, the capacitor electrodes, the strap, and/or theantenna) may have any of the sizes, shapes, and/or characteristics asthose described herein with regard to that structure. In someembodiments, the device of FIG. 10A may also comprise a passivationlayer over the electrically conducting strap and the upper capacitorelectrode, as described herein.

As shown in FIG. 10B, in some variations, a backing and/or support layer390 may be desired (or required) to provide mechanical stability and/orprotection for the device during later handling and/or processing. Sucha backing layer may be laminated to paper or a flexible polymericmaterial (e.g., polyethylene, polypropylene, polyvinyl chloride,polytetrafluoroethylene, a polycarbonate, an electrically insulatingpolyimide, polystyrene, copolymers thereof, etc.). In addition toproviding mechanical support to the device, such a support and/orbacking layer may also provide an adhesive surface for subsequentattachment or placement of the surveillance/identification device ontoan article to be tracked or monitored.

An Exemplary Surveillance and/or Identification Device with SeriesCapacitors

An exemplary surveillance and/or identification device 500 with aplurality of capacitors connected in series is shown in FIGS. 11 and 12(cross-sectional and top-down views, respectively).

i. The Substrate

As shown in FIG. 11, the surveillance and/or identification device withseries capacitors comprises a substrate 510 and a first dielectric film540 thereon. In exemplary embodiments, the substrate comprises anelectrically conductive (e.g., electrically functional) material asdescribed herein. In exemplary embodiments, the conductive substratecomprises or consists essentially of aluminum. In some implementations,the metal for the electrically conductive substrate may be chosen atleast in part based on its ability to be anodized into an effectivedielectric film. In preferred embodiments, the capacitors share theelectrically conducting substrate (e.g., metal sheet, metal foil, etc.)510 as a common lower capacitor electrode (see, e.g., the node “foil” inFIG. 2).

However, the device is not limited to an electrically conductivesubstrate. On the contrary, in some variations, the device may comprisean insulative substrate (e.g., glass, ceramic, plastic, etc.) aspreviously described herein. In embodiments comprising an insulativesubstrate, there is a conductive layer (e.g., the lower capacitorelectrodes) on the insulative substrate (not shown in FIG. 11), and inexemplary embodiments, the capacitors may share the conductive layer asa common lower capacitor electrode. Furthermore, in some embodiments,the device may further include a conductive or non-conductive adhesiveon the (electrically conductive) substrate for attaching the device/tagto an item (not shown).

In exemplary embodiments, the conductive substrate may have a nominalthickness of from 1 to 300 μm (e.g., 3 to 200 μm, 5 to 100 μm, or anyother range of values therein). Preferably the substrate has a thicknessof from 1 to 100 μm, or any other range of values therein. Furthermore,the conductive substrate may have a resistivity of 0.1 to 100 μohm-cm(preferably 0.5 to 5 μohm-cm), or any other range of values therein.

ii. Exemplary Capacitor Electrodes

As shown in FIG. 11, a plurality of capacitor electrodes 530/535 are onthe first dielectric film 540, and the capacitor electrodes arecapacitively coupled to the substrate 510.

Consequently, the electrically conductive substrate 510, the firstdielectric film 540, and the plurality of capacitor electrodes 535/530form capacitors C1 and C2 connected in series (see also FIG. 2).

In exemplary embodiments, the upper capacitor electrodes comprise acontact pad (e.g., P1 and P2 of FIGS. 11 and 12) for electricallyconnecting the capacitors with the antenna and/or inductor (e.g.,structures 570 and 575 of FIGS. 11 and 12). Alternatively, the uppercapacitor electrodes may be electrically connected to contact pads. Inaddition, the upper capacitor electrodes 530 and 535 may be formed sideby side, but are generally physically isolated from one another. Forexample, the capacitor electrodes may be physically isolated orseparated by a relatively thick dielectric film 580 on the firstdielectric film 540 having openings into/onto which the electrodes530/535 are formed.

The capacitor electrodes may comprise any conductive material (e.g., ametal, a conductive polymer, a conductive inorganic compound, a dopedsemiconductor, etc.) described herein with regard to conductivestructures and/or methods of forming conductive structures. In someembodiments, the upper and lower capacitor electrodes may comprise thesame material, or alternatively, they may comprise different materials.For example, in some embodiments, the conductive substrate (orconductive layer) comprises a first metal and the upper capacitorelectrodes comprise a second metal.

As previously discussed, in preferred embodiments, the capacitors inseries share the conductive substrate (or conductive layer on aninsulating substrate) as lower capacitor electrodes. Consequently, thelower capacitor electrodes have the same characteristics as describedwith regard to exemplary substrates. The upper capacitor electrodes mayhave any desired shape (e.g., round, square, rectangular, triangular,dome-shaped, etc.), characteristics, size, and nearly any dimensionsthat allow it to fit in and/or on the surveillance/identification deviceas discussed herein.

iii. Exemplary Dielectric Film Layers

Referring again to FIG. 11, embodiments of the present invention includea plurality of dielectric film layers (e.g., capacitor dielectric film540, thick dielectric layer 580, and/or the upper capacitor dielectriclayer 560). The capacitor dielectric film 540 is formed on some or allof the conductive substrate 510, and separates the conductive substrate(e.g., lower capacitor electrodes) from the upper capacitor electrodes530/535. In general, the capacitor dielectric film 540 may have athickness of from 50 to 400 Å, or any range of values therein. Arelatively thick dielectric film 580 may be formed on portions thecapacitor dielectric film 540, and generally has one or more contactholes/capacitor electrode openings therein. In preferred embodiments,the thick dielectric film 580 has a sufficient thickness to keepcapacitance between the portions of the upper capacitor electrodes530/535 (e.g., at contact pads P1 and P2) on the thick dielectric film580 and the substrate 510 to a value significantly less than thecapacitances of the plurality of capacitors (e.g., C1 and C2) on thefirst dielectric layer 540.

As shown in FIG. 11, the device also comprises a dielectric layer (e.g.,interlayer dielectric layer 560) on or over the upper capacitorelectrodes 530/535. The dielectric layer 560 has contact holes orconnection openings therein exposing a portion of the top electrodes,for example at contact pads P1 and P2. Such a structure permits assemblyof the device onto an antenna and/or inductor 570 with electricalcontacts 575 at contact pads P1 and P2, without requiring a directelectrical connection to the electrically conductive substrate 510. Insome embodiments, the dielectric layer on the upper electrodes (e.g.,ILD 560) has a greater thickness than the capacitor dielectric film 540on the substrate 510.

In general, the dielectric films may comprise any electricallyinsulative dielectric material (e.g., an inorganic insulator, aliquid-phase dielectric precursor ink, etc.) as discussed herein, andmay have the same or similar characteristics as discussed herein.

iv. The Antenna and/or Inductor

Exemplary devices with series capacitors comprise an antenna and/orinductor (e.g., 570/575) electrically contacting the upper capacitorelectrodes (e.g., at contact pads P1 and P2), as shown in FIGS. 11 and12. The antenna and/or inductor of devices with series capacitors mayhave the same or similar characteristics as those described in detailherein. However, in contrast to devices with parallel capacitors, thedevice with series capacitors generally does not include an electricallyconducting strap. Therefore, the antenna/inductor shown in the device ofFIGS. 11 and 12 electrically connects the upper capacitor plates, anddoes not connect the upper capacitor electrodes to an electricallyconducting strap.

In general, the antenna/inductor may comprise any conductive material asdescribed herein, and preferably the antenna/inductor comprises a metal(e.g., aluminum, copper, alloys thereof, etc.). In some embodiments, theantenna may comprise one or more contact pad regions for connecting theantenna to the upper capacitor electrodes. The antenna/inductor may beattached to the capacitor electrodes by a conductive or non-conductiveadhesive, and may further comprise a backing and/or support layer forattachment to or placement of the device/tag to an article or product.However, the backing and/or support layer may alternately be on apassivation layer as described herein, or on the substrate (see, e.g.,layer 104 b in FIG. 3C).

The antenna/inductor may comprise a coil having a plurality of loops orrings as described herein, and may take any form and/or shape suitablefor such antennas and/or inductors. For example, the antenna (andoptionally the contact/interconnection pads) of the present device mayhave any of the shapes, dimensions, or designs described herein.Furthermore, the present device may also comprise a passivation layer orother additional backing or support layer the same or similar to thosedescribed herein.

Exemplary Methods of Detecting Items Using the Present Surveillanceand/or Identification Tags/Devices

The present invention further relates to method of detecting an item orobject in a detection zone comprising the steps of: (a) causing orinducing a current in the device(s) of the present invention sufficientfor the device to radiate, reflect, backscatter, or absorb detectableelectromagnetic radiation (preferably at a frequency that is an integermultiple or an integer divisor of an applied electromagnetic field), (b)detecting the detectable electromagnetic radiation, and optionally, (c)selectively deactivating the device and/or causing the device to takeaction. Generally, currents and voltages are induced in the presentdevice sufficient for the device to radiate, reflect, backscatter, orabsorb detectable electromagnetic radiation when the device is in adetection zone comprising an oscillating electromagnetic field. Thisoscillating electromagnetic field is produced or generated byconventional surveillance/identification detection equipment and/orsystems.

The present method of use may further comprise attaching, affixing orotherwise including the present device on or in an object or article tobe detected. Furthermore, in accordance with an advantage of the presentdevice, the tag or device may be deactivated by non-volatile shifting ofthe thresholds (i.e., position of the CV curve features versus voltage)or capacitance of the device in response to an applied electromagneticfield having sufficient strength and an effective oscillating frequencyto induce a current, voltage and/or resonance in the device. Typically,the device is deactivated when the presence of the object or article inthe detection zone is not to be detected or otherwise known.

Use of electronic and/or wireless identification and security systemsfor detecting and/or preventing theft or unauthorized removal ofarticles or goods from retail establishments and/or other facilities(e.g., libraries, etc.) has become widespread. In general,surveillance/identification device systems employ a label or securitytag/device (e.g., an EAS, RF, RFID, etc.), which is affixed to, placedinside, associated with, or otherwise secured to an article or item tobe detected (e.g., protected) or the packaging of the item.Surveillance/identification tags may have many different sizes, shapesand forms, depending on the particular type of system in use, the typeand size of the article, etc. In general, such systems are employed fordetecting the presence or absence of an active security tag as thesecurity tag and the protected article to which it is affixed (or placedinside) pass through a security or surveillance zone or pass by or neara security checkpoint or surveillance station. However, the presentinvention is not limited to security. For example, the presentsurveillance/identification devices may further comprise logic, whichcauses the device to perform an action upon detection in the detectionzone.

The present tags are designed at least in part to work with electronicsecurity systems that sense disturbances in radio frequency (RF)electromagnetic fields. Such electronic security systems generallyestablish an electromagnetic field in a controlled area defined byportals through which articles must pass in leaving the controlledpremises (e.g., a retail store). A tag/device having a resonant circuitis attached to each article, and the presence of the tag circuit in thecontrolled area is sensed by a receiving system to denote theunauthorized removal of an article. The tag circuit may be deactivated,detuned or removed by authorized personnel from any article authorizedto leave the premises to permit passage of the article through thecontrolled area equipped with alarm activation. Most of the tags thatoperate on this principle are single-use or disposable tags, and aretherefore designed to be produced at low cost in very large volumes.

The present tags may be used (and, if desired and/or applicable,re-used) in any commercial application and in essentially any frequencyrange for such applications. For example, the present tags may be usedat the frequencies, and in the fields and/or ranges, described in theTable below:

TABLE 1 Exemplary Applications. Preferred Range/Field Range/FieldPreferred of Detection/ of Detection/ Exemplary Commercial FrequenciesFrequencies Response Response Application(s) 100-150 KHz 125-134 KHz upto 10 feet up to 5 feet animal ID, car anti-theft systems, beer kegtracking about 8.2 MHz 8.2 MHz up to 10 feet up to 5 feet anti-theft,inventory tracking (e.g., libraries, apparel, auto/ motorcycle parts),building security/access about 13.56 MHz 13.56 MHz up to 10 feet up to 5feet inventory tracking (e.g., libraries, apparel, auto/ motorcycleparts), building security/access 800-1000 MHz 868-928 MHz up to 30 feet up to 18 feet pallet and shipping container tracking, shipyardcontainer tracking 2.4-2.5 GHz about 2.45 GHz up to 30 feet  up to 20feet auto toll tags

Deactivation methods generally incorporate remote electronicdeactivation of a resonant tag circuit such that the deactivated tag canremain on an article properly leaving the premises. Examples of suchdeactivation systems are described in U.S. Pat. Nos. 4,728,938 and5,081,445, the relevant portions of each of which are incorporatedherein by reference. Electronic deactivation of a resonantsecurity/identification tag involves changing or destroying thedetection frequency resonance so that the security tag is no longerdetected as an active security tag by the security system. There aremany methods available for achieving electronic deactivation. Ingeneral, however, the known methods involve either short circuiting aportion of the resonant circuit or creating an open circuit within someportion of the resonant circuit to either spoil the Q of the circuit orshift the resonant frequency out of the frequency range of the detectionsystem, or both.

At energy levels that are typically higher than the detecting signal,but generally within FCC regulations, the deactivation apparatus inducesa voltage in the resonant circuit of the tag or device sufficient tocause the dielectric film between the lower capacitor electrode and theupper capacitor electrode to break down. Thus, the presentsurveillance/identification device(s) described herein can beconveniently deactivated at a checkout counter or other similar locationby momentarily placing the tag above or near the deactivation apparatus.

The present invention thus also pertains to article surveillancetechniques wherein electromagnetic waves are transmitted into an area ofthe premises being protected at a fundamental frequency (e.g., 13.56MHz), and the unauthorized presence of articles in the area is sensed byreception and detection of electromagnetic radiation emitted or absorbedby the present surveillance/identification device(s). This emitted orabsorbed electromagnetic radiation may comprise second harmonic orsubsequent harmonic frequency waves reradiated from sensor-emitterelements, labels, or films comprising the present wireless surveillancedevice that has been attached to or embedded in the articles, undercircumstances in which the labels or films have not been deactivated forauthorized removal from the premises.

A method of article surveillance, theft detection, or other methods ofidentification according to aspects of the present invention may beunderstood with the following description of the sequential stepsutilized. The present surveillance/identification tag (for example,formed integrally with a price label) is attached to or embedded in anitem, article or object that may be under system surveillance. Next, anyactive tags/devices on articles that have been paid for or otherwiseauthorized for removal from the surveillance area may be deactivated ordesensitized by a deactivation apparatus operator (e.g., a checkoutclerk or guard) monitoring the premises. Thereafter, harmonic frequencyemissions or re-radiation signals or electromagnetic waves or energyfrom devices/tags that have not been deactivated or desensitized aredetected as they are moved through a detection zone (e.g., an exit orverification area) in which a fundamental frequency electromagnetic waveor electrical space energy field is present. The detection of harmonicsignals in this area signifies the unauthorized presence or attemptedremoval of unverified articles with active devices/tags thereon, and maybe used to signal or trigger an alarm or to lock exit doors orturnstiles. While the detection of tag signals at a frequency of 2 timesor ½ the carrier or reader transmit frequency represents a preferredform of the method of use, other harmonic signals, such as third andsubsequent harmonic signals, as well as fundamental and othersubharmonic signals, may be employed.

CONCLUSION/SUMMARY

Thus, the present invention provides surveillance and/or identificationtags/devices having capacitors connected in parallel or in series, andmethods of making and using such devices. Aspects of the presentinvention relate to surveillance and/or identification devices withparallel capacitors. Devices having capacitors connected in parallelresult in both a high-precision capacitance and a low breakdown voltagefor easy tag deactivation. In such embodiments, a single capacitorgenerally used in surveillance and/or identification devices is replacedwith a plurality of capacitors, which are connected in parallel. Ingeneral, one of the capacitors is fabricated with a thicker dielectricthan the other(s), which results in a large-area capacitor. The largegeometric features of the large-area capacitor allow the capacitor to bemanufactured to a high precision of capacitance within the tolerances ofthe printing or patterning processes used to define the capacitor. Asecond, smaller capacitor is fabricated with a much thinner dielectricfilm. This allows the smaller capacitor to break down at the low voltagerequired for surveillance tag deactivation. In addition, the capacitanceof the smaller capacitor is smaller than that of the large-areacapacitor, so that it can be fabricated with a relatively poor precisioncompared to that of the large-area capacitor, and still have arelatively minor effect on the overall precision of the net capacitanceof the device.

Additional aspects of the present invention relate to tags/devices withseries capacitors. By manufacturing a device with capacitors connectedin series, lateral dimensions of a small capacitor can be increased.This makes the capacitor easier to manufacture using techniques, such asprinting processes, that may have relatively limited resolutioncapabilities. In such embodiments, a single capacitor is replaced with aplurality of capacitors connected in series (e.g., C1 and C2 of FIG. 2),preferably sharing a common electrode. The capacitances of the deviceadd in series to an effective net capacitance of CT as shown in theformula 1/CT=1/C1+1/C2. If the capacitance of C1 and C2 are equal, bothC1 and C2 are twice the capacitance of the net capacitance CT, and thushave an area twice as large as that of a single capacitor withcapacitance CT. This may result in an increased dimensional toleranceallowed for any printing or patterning steps that are used to define thecapacitor area.

The foregoing descriptions of specific embodiments of the presentinvention have been presented for purposes of illustration anddescription. They are not intended to be exhaustive or to limit theinvention to the precise forms disclosed, and obviously manymodifications and variations are possible in light of the aboveteaching. The embodiments were chosen and described in order to bestexplain the principles of the invention and its practical application,to thereby enable others skilled in the art to best utilize theinvention and various embodiments with various modifications as aresuited to the particular use contemplated. It is intended that the scopeof the invention be defined by the Claims appended hereto and theirequivalents.

1. A surveillance and/or identification device, comprising: a) anelectrically conducting strap on a substrate; b) a lower capacitorelectrode on or over the substrate, electrically connected to the strap;c) a first dielectric film on the substrate and on or over a portion ofthe strap, the first dielectric film exposing a portion of the strap andhaving an opening over a portion of the lower capacitor electrode; d) acapacitor dielectric film on the lower capacitor electrode in theopening, the capacitor dielectric film having a significantly smallerthickness than the first dielectric film; e) an upper capacitorelectrode on the first dielectric film and the capacitor dielectricfilm, the upper capacitor electrode capacitively coupled to the lowercapacitor electrode; and f) an antenna and/or inductor electricallyconnected to the upper capacitor electrode and the strap.
 2. The deviceof claim 1, wherein the strap and the lower capacitor electrode comprisethe same material.
 3. The device of claim 1, wherein the capacitordielectric film has a thickness of from 20 to 1000 Å.
 4. The device ofclaim 3, wherein the first dielectric film has a thickness of from 5000to 20,000 Å.
 5. The device of claim 1, wherein the opening in the firstdielectric film has an area not greater than 20% of the area between theupper and lower capacitor electrodes containing the first dielectricfilm.
 6. A method for making a surveillance and/or identificationdevice, comprising the steps of: a) forming an electrically conductingstrap and a lower capacitor electrode on or over a substrate; b) forminga first dielectric film on the substrate and on or over a portion of thestrap, the first dielectric film exposing a portion of the strap andhaving an opening over a portion of the lower capacitor electrode; c)forming a capacitor dielectric film in the opening, the capacitordielectric film having a significantly smaller thickness than the firstdielectric film; d) forming an upper capacitor electrode on the firstdielectric film and the capacitor dielectric film, such that the uppercapacitor electrode is capacitively coupled to the lower capacitorelectrode; and e) forming an antenna and/or inductor on, or attachingthe antenna and/or inductor to, the upper capacitor electrode and thestrap.
 7. The method of claim 6, wherein forming the strap comprisesprinting a conductor ink on the substrate.
 8. The method of claim 6,wherein forming the first dielectric film comprises selectivelydepositing a first dielectric material on the strap and the lowerelectrode such that predetermined regions of the strap and the lowerelectrode are exposed.
 9. The method of claim 8, wherein forming thefirst dielectric film comprises printing a dielectric precursor ink. 10.The method of claim 6, wherein forming the lower capacitor electrodecomprises printing a metal ink on the capacitor dielectric film and thefirst dielectric film.
 11. The method of claim 6, wherein forming theantenna and/or inductor comprises printing a continuous metal/conductorink pattern on the upper capacitor electrode and the strap.
 12. Themethod of claim 6, wherein forming the first dielectric film comprisesthe steps of (1) depositing a liquid-phase dielectric precursor ink, and(ii) drying and/or curing the dielectric precursor to form thedielectric film.
 13. A surveillance and/or identification device,comprising: a) an antenna and/or an inductor on a substrate; b) a lowercapacitor electrode, on or over the substrate and in electrical contactwith the antenna and/or inductor; c) a first dielectric film on or overthe antenna and/or inductor and the lower capacitor electrode, the firstdielectric film having a hole therein exposing a portion of the antennaand/or inductor and an opening therein over the lower capacitorelectrode; d) a relatively thin capacitor dielectric film on the lowercapacitor electrode, in the opening in the first dielectric film andhaving a thickness significantly less than that of the first dielectricfilm; e) an upper capacitor electrode, capacitively coupled to the lowercapacitor electrode; and f) an electrically conducting strap configuredto provide electrical communication between the upper capacitorelectrode and the antenna and/or inductor.
 14. The device of claim 13,wherein the thin capacitor dielectric film comprises a correspondingoxide of a metal forming the lower capacitor electrode.
 15. A method formaking a surveillance and/or identification device, comprising the stepsof: a) forming an antenna and/or inductor on a substrate and a lowercapacitor electrode in electrical communication with a first end of theantenna/inductor; b) forming a relatively thin capacitor dielectric filmon at least a first part of the lower capacitor electrode; c) forming arelatively thick capacitor dielectric on or over a second part of thelower capacitor electrode, the second part of the lower capacitorelectrode not overlapping with the first part thereof; d) forming anupper capacitor electrode on the thin and thick capacitor dielectricfilms, capacitively coupled to the lower capacitor electrode; and e)forming an electrically conducting strap configured to provideelectrical communication between the upper capacitor electrode and asecond end of the antenna/inductor.
 16. The method of claim 15, furthercomprising forming a first dielectric film on the antenna/inductor priorto forming the lower capacitor electrode, wherein the first dielectricfilm has a contact hole therein exposing a portion of theantenna/inductor.
 17. The method of claim 15, wherein forming therelatively thin capacitor dielectric film comprises thermally and/orchemically oxidizing an exposed surface of the lower capacitorelectrode.
 18. The method of claim 15, wherein forming the relativelythick capacitor dielectric film comprises selectively depositing adielectric material on part of the lower capacitor electrode.
 19. Themethod of claim 15, wherein forming the relatively thick capacitordielectric film comprises printing a dielectric precursor ink, anddrying and curing the dielectric precursor ink.
 20. The method of claim16, wherein forming the lower capacitor electrode comprises printing ametal ink in an opening in the first dielectric film exposing the firstend of the antenna/inductor.
 21. The method of claim 15, wherein formingthe antenna and/or inductor comprises printing a metal/conductor ink.22. The method of claim 15, wherein forming the relatively thickdielectric film comprises the steps of (1) depositing a liquid-phasedielectric precursor ink, and (ii) drying and/or curing the dielectricprecursor.
 23. A method of detecting items, comprising the steps of: a)causing or inducing a current in the device of claim 1 sufficient forthe device to radiate, absorb, or backscatter detectable electromagneticradiation; b) detecting the detectable electromagnetic radiation; and c)optionally, selectively deactivating the device.
 24. A method for makinga surveillance and/or identification device, comprising the steps of: a)forming a first dielectric film on an electrically functional substrate;b) forming a plurality of capacitor electrodes on the first dielectricfilm, the capacitor electrodes being capacitively coupled to thesubstrate and physically isolated from each other; c) forming a seconddielectric film on or over the capacitor electrodes, the seconddielectric film having holes therein to facilitate electrical connectionto the capacitor electrodes; and d) forming an inductor electricallyconnected to each of the capacitor electrodes.
 25. The method of claim24, wherein the substrate, the first dielectric film, and the pluralityof capacitor electrodes form a plurality of capacitors connected inseries.
 26. The method of claim 25, further comprising forming a thirddielectric film on the first dielectric film, having openings thereinfor forming the capacitor electrodes.
 27. The method of claim 24,wherein the second dielectric film is thicker than the first dielectricfilm.
 28. The method of claim 26, wherein forming the capacitorelectrodes comprises printing a metal ink into openings in the thirddielectric film.
 29. The method of claim 26, comprising forming thesecond dielectric film by selective deposition on the substrate suchthat openings are formed therein.
 30. The method of claim 29, whereinforming the second dielectric film comprises printing a dielectricprecursor ink.
 31. The method of claim 26, wherein forming the thirddielectric film comprises printing a dielectric precursor ink.
 32. Themethod of claim 24, wherein the electrically functional substratecomprises a metal sheet or metal foil.
 33. The method of claim 32,wherein the capacitor electrodes share the metal sheet or metal foil asa common electrode.
 34. The method of claim 24, wherein forming thecapacitor electrodes comprises depositing a metal/conductor onto atleast part of the first dielectric film, and etching themetal/conductor.
 35. The method of claim 24, wherein forming the seconddielectric film comprises the steps of (i) depositing a liquid-phasedielectric precursor ink, and (ii) drying and/or curing the dielectricprecursor to form the second dielectric film.
 36. A surveillance and/oridentification device, comprising: a) an electrically conductivesubstrate; b) a first dielectric film on the electrically conductivesubstrate; c) a plurality of capacitor electrodes on the firstdielectric film, capacitively coupled to the substrate and physicallyisolated from each other; d) a second dielectric film on or over thecapacitor electrodes, the second dielectric film having holes therein;and e) an inductor electrically connected to the plurality of capacitorelectrodes through the holes.
 37. The device of claim 36, wherein thesubstrate, the first dielectric film, and the plurality of capacitorelectrodes form a plurality of capacitors connected in series.
 38. Thedevice of claim 36, wherein the second dielectric film is thicker thanthe first dielectric film.
 39. The device of claim 36, furthercomprising a third dielectric film on the first dielectric film, havingopenings therein for forming the capacitor electrodes.
 40. The device ofclaim 36, wherein the first dielectric film comprises a correspondingoxide of a metal that forms the inductor.
 41. The device of claim 36,wherein the second dielectric film comprises an oxide and/or nitride ofa second Group IVA element.
 42. The device of claim 36, wherein theelectrically functional substrate comprises a metal sheet or metal foil.43. The method of claim 42, wherein the capacitor electrodes share themetal sheet or metal foil as a common electrode.
 44. A method ofdetecting items, comprising the steps of: causing or inducing a currentin the device of claim 36 sufficient for the device to radiate, absorb,or backscatter detectable electromagnetic radiation; b) detecting thedetectable electromagnetic radiation; and c) optionally, selectivelydeactivating the device.